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1. (WO2010022839) SPECTRAL PURITY FILTER AND LITHOGRAPHIC APPARATUS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2010/022839    International Application No.:    PCT/EP2009/005487
Publication Date: 04.03.2010 International Filing Date: 29.07.2009
IPC:
G03F 7/20 (2006.01), G02B 5/08 (2006.01), G21K 1/06 (2006.01)
Applicants: ASML NETHERLANDS B.V. [NL/NL]; De Rue 6501 NL-5504 DR Veldhoven (NL) (For All Designated States Except US).
VAN HERPEN, Maarten, Marinus, Johannes, Wilhelmus [NL/NL]; (NL) (For US Only).
SOER, Wouter, Anthon [NL/NL]; (NL) (For US Only)
Inventors: VAN HERPEN, Maarten, Marinus, Johannes, Wilhelmus; (NL).
SOER, Wouter, Anthon; (NL)
Agent: SLENDERS, P., J., W.; ASML Netherlands B.V. De Run 6501 NL-5504 DR Veldhoven (NL)
Priority Data:
61/136,331 28.08.2008 US
61/193,202 05.11.2008 US
Title (EN) SPECTRAL PURITY FILTER AND LITHOGRAPHIC APPARATUS
(FR) FILTRE DE PURETÉ SPECTRALE ET APPAREIL LITHOGRAPHIQUE
Abstract: front page image
(EN)A spectral purity filter (30) is configured to reflect extreme ultraviolet radiation. The spectral purity filter (30) includes a substrate (31), and an anti-reflective coating (32) on a top surface of the substrate (31). The anti-reflective coating (32) is configured to transmit infrared radiation. The filter also includes a multi-layer stack (33) configured to reflect extreme ultraviolet radiation and to substantially transmit infrared radiation.
(FR)L'invention concerne un filtre de pureté spectrale qui est configuré pour réfléchir le rayonnement dans l'ultraviolet extrême. Le filtre de pureté spectrale inclut un substrat et un revêtement anti-réfléchissant sur une surface supérieure du substrat. Le revêtement anti-réfléchissant est conçu pour transmettre le rayonnement infrarouge. Le filtre inclut également un empilement multi-couche conçu pour réfléchir le rayonnement ultraviolet extrême et pour transmettre essentiellement le rayonnement infrarouge.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)