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1. WO2010008789 - INTERFEROMETRIC CHEMICAL SENSOR ARRAY

Publication Number WO/2010/008789
Publication Date 21.01.2010
International Application No. PCT/US2009/048125
International Filing Date 22.06.2009
IPC
B81B 7/02 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
7Microstructural systems
02containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems (MEMS)
B81B 7/04 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
7Microstructural systems
04Networks or arrays of similar microstructural devices
G01B 9/02 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers
CPC
G01B 9/02023
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers ; for determining dimensional properties of, or relations between, measurement objects
02015characterised by a particular beam path configuration
02023Indirect probing of object, e.g. via influence on cavity or fibre
G01B 9/02051
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers ; for determining dimensional properties of, or relations between, measurement objects
02049characterised by particular mechanical design details
02051Integrated design, e.g. on-chip or monolithic
G01N 21/45
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
41Refractivity; Phase-affecting properties, e.g. optical path length
45using interferometric methods; using Schlieren methods
G02B 2006/12097
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6Light guides
10of the optical waveguide type
12of the integrated circuit kind
12083Constructional arrangements
12097Ridge, rib or the like
G02B 2006/12104
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6Light guides
10of the optical waveguide type
12of the integrated circuit kind
12083Constructional arrangements
12104Mirror; Reflectors or the like
G02B 2006/12138
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6Light guides
10of the optical waveguide type
12of the integrated circuit kind
12133Functions
12138Sensor
Applicants
  • UNIVERSITY OF SOUTH FLORIDA [US]/[US] (AllExceptUS)
  • ASH, William, M. [US]/[US] (UsOnly)
Inventors
  • ASH, William, M.
Agents
  • HOPEN, Anton, J.
Priority Data
61/074,72423.06.2008US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) INTERFEROMETRIC CHEMICAL SENSOR ARRAY
(FR) RÉSEAU DE CAPTEURS CHIMIQUES INTERFÉROMÉTRIQUES
Abstract
(EN)
The device is a gas/vapor/aerosol/particulate sensor with a receiver/transmitter option. This optical MEMS device is designed to be a self-contained optical bench, integrating of an entire interferometer into a MOEMS 'optical bench' system-on-a-chip, and includes multiplexed optical path sensors. The sensing structures consist of laser sources, semiconductor photo detectors, refractive/reflective optical elements, and specialized optical transmission paths. Each individual laser source and photodiode is an optical path sensor with a particular 'functionalization.' These sensing arm functionalizations are sensitive to unique chemical signatures and as a result can recognize and report various chemical agents present in the ambient environment.
(FR)
La présente invention porte sur un dispositif qui est un capteur de gaz/vapeur/aérosol particulier avec une option de réception/émission. Ce dispositif optique MEMS est conçu pour être un banc optique, intégrant tout un interféromètre dans un système sur un système sur puce de « banc optique » MOEMS, et comprend des capteurs de trajet optique multiplexés. Les structures de détection se composent de sources laser, de photodétecteurs à semi-conducteur, d'éléments optiques réfringents/réflecteurs et de trajets de transmission optique spécialisés. Chaque source laser individuelle et chaque photodiode constituent un capteur de trajet optique doté d’une « fonctionnalisation » particulière. Ces fonctionnalisations de bras de détection sont sensibles à des signatures chimiques uniques et elles peuvent donc reconnaître et signaler divers agents chimiques présents dans le milieu ambiant.
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