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Machine translation
1. (WO2009142446) VACUUM PROCESSING SYSTEM, BUFFER MODULE USED THEREIN AND TRAY TRANSFERRING METHOD OF THE VACUUM PROCESSING SYSTEM
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2009/142446    International Application No.:    PCT/KR2009/002678
Publication Date: 26.11.2009 International Filing Date: 21.05.2009
IPC:
H01L 21/677 (2006.01)
Applicants: IPS LTD. [KR/KR]; 33, Jije-dong Pyeongtaek-city, Gyeonggi-do 450-090 (KR) (For All Designated States Except US).
LEE, Ju Hee [KR/KR]; (KR) (For US Only).
CHA, Kun Soo [KR/KR]; (KR) (For US Only).
YANG, Hyo Sung [KR/KR]; (KR) (For US Only).
JIN, Sang Woo [KR/KR]; (KR) (For US Only)
Inventors: LEE, Ju Hee; (KR).
CHA, Kun Soo; (KR).
YANG, Hyo Sung; (KR).
JIN, Sang Woo; (KR)
Agent: B&IP PATENT AND LAW FIRM; Youjeong Bldg. 5th Fl., 720-21 Yeoksam 2-dong, Gangnam-gu Seoul 135-920 (KR)
Priority Data:
10-2008-0047005 21.05.2008 KR
Title (EN) VACUUM PROCESSING SYSTEM, BUFFER MODULE USED THEREIN AND TRAY TRANSFERRING METHOD OF THE VACUUM PROCESSING SYSTEM
(FR) SYSTÈME DE TRAITEMENT SOUS VIDE, MODULE TAMPON UTILISÉ DANS LE SYSTÈME ET PROCÉDÉ DE TRANSFERT DE PLATEAU
(KO) 진공처리시스템, 진공처리시스템에 사용되는 버퍼모듈 및 진공처리시스템의 트레이 이송방법
Abstract: front page image
(EN)The present invention relates to a vacuum processing system, and more specifically to a vacuum processing system which performs a vacuum-processing procedure, such as etching and depositing, on the surface of a substrate in a vacuum state. The present invention comprises: a loading/unloading module which loads or unloads a plurality of substrates onto or from a tray; one or more process modules installed in one side of the loading/unloading module and having a closed processing space such that the tray on which the substrates are loaded is transferred and the process is carried out; a buffer module having at least one buffer unit on which the tray is temporarily loaded, which receives the tray from the loading/unloading module and then covers the upper side of the tray with a cover member having a plurality of slits before transferring it to the process module, and which receives the tray covered with the cover member from the process module and then removes the cover member from the tray before transferring it to the loading/unloading module; a transfer unit which transfers the tray between the loading/unloading module and buffer module and between the process module and buffer module.
(FR)L'invention concerne un système de traitement sous vide, plus particulièrement, un système de traitement sous vide conçu pour exécuter une traitement sous vide, tel que le mordançage ou le dépôt, sur la surface d'un substrat à l'état sous-vide. La présente invention comprend un module de chargement/déchargement qui charge ou décharge une pluralité de substrats vers ou depuis un plateau; un ou plusieurs modules de traitement installés sur un côté du module de chargement/déchargement de manière à comprendre un espace de traitement clos à l'intérieur duquel les substrats chargés dans le plateau sont transférés et le traitement est exécuté; un module tampon qui comprend au moins un bloc tampon dans lequel le plateau est provisoirement chargé; un bloc de transfert qui transfert le plateau entre le module de chargement/déchargement et le module tampon et entre le module de traitement et le module tampon. Le bloc tampon reçoit le plateau depuis le module de chargement/déchargement puis recouvre le côté supérieur du plateau avec un élément de couverture pourvu d'une pluralité d'encoches avant de le transférer vers le module de traitement, puis il reçoit le plateau recouvert de l'élément de couverture provenant du module de traitement et retire l'élément de couverture du plateau avant de transférer ce dernier vers le module de chargement/déchargement.
(KO)본 발명은 진공처리시스템에 관한 것으로서, 상세하게는 진공상태에서 기판의 표면을 식각, 증착하는 등 기판에 대한 진공처리를 수행하는 진공처리시스템에 관한 것이다. 본 발명은 다수개의 기판들이 트레이에 로딩되거나 언로딩되는 로딩/언로딩모듈과; 상기 로딩/언로딩모듈의 일측에 설치되고 다수개의 기판들이 로딩된 트레이를 이송받아 공정을 수행할 수 있도록 밀폐된 처리공간을 가지는 하나 이상의 공정모듈과; 트레이가 임시로 로딩되는 하나 이상의 버퍼부를 가지며, 상기 버퍼부에서 상기 로딩/언로딩모듈로부터 트레이를 이송받아 상기 공정모듈로 전달하기 전에 트레이의 상측에 다수개의 슬릿이 형성된 커버부재로 복개하며, 상기 공정모듈로부터 커버부재가 복개된 트레이를 이송받아 상기 로딩/언로딩모듈로 전달하기 전에 커버부재를 트레이로부터 제거하는 버퍼모듈과; 상기 로딩/언로딩모듈 및 상기 버퍼모듈 간의 트레이 이송 및 상기 공정모듈 및 상기 버퍼모듈 간의 트레이 이송을 수행하는 이송부를 포함하는 것을 특징으로 하는 진공처리시스템을 개시한다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Korean (KO)
Filing Language: Korean (KO)