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1. (WO2009141584) METHOD AND APPARATUS FOR COMPENSATING FOR OFF-AXIS FOCAL SPOT DISTORTION
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2009/141584    International Application No.:    PCT/GB2009/001220
Publication Date: 26.11.2009 International Filing Date: 15.05.2009
IPC:
B23K 26/06 (2006.01), B23K 26/08 (2006.01)
Applicants: M-SOLV LIMITED [GB/GB]; Oxonian Park Langford Locks Kidlington Oxford OX5 1FP (GB) (For All Designated States Except US).
RUMSBY, Philip, Thomas [GB/GB]; (GB) (For US Only)
Inventors: RUMSBY, Philip, Thomas; (GB)
Agent: UNWIN, Stephen, Geoffrey; Fry Heath & Spence LLP The Gables Massetts Road Horley Surrey RH6 7DQ (GB)
Priority Data:
0809003.7 17.05.2008 GB
Title (EN) METHOD AND APPARATUS FOR COMPENSATING FOR OFF-AXIS FOCAL SPOT DISTORTION
(FR) PROCÉDÉ ET APPAREIL DESTINÉ À COMPENSER LA DISTORSION DE FOYER HORS AXE
Abstract: front page image
(EN)A method and apparatus is described that allows accurate control of the width of fine line structures ablated by lasers in thin films on substrates when using scanner and focussing lens systems. The method provides dynamic compensation for optical distortions introduced by the scan lens at off axis points by increasing the laser power or energy in the beam in order to overcome the reduction in power or energy density.
(FR)L'invention concerne un procédé et appareil qui permet un contrôle précis de la largeur de structures à trait fin ablatées par lasers dans des films minces sur des substrats lors de l'utilisation de systèmes de scanner et de lentille de focalisation. Le procédé permet la compensation dynamique de distorsions optiques provoquées par la lentille de balayage à des points excentrés en accroissant la puissance ou l'énergie laser dans le faisceau afin de surmonter la réduction de la densité de puissance ou d'énergie.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)