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Machine translation
1. (WO2009141534) DEVICE AND METHOD FOR INSPECTING SEMICONDUCTOR WAFERS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2009/141534    International Application No.:    PCT/FR2009/000544
Publication Date: 26.11.2009 International Filing Date: 11.05.2009
IPC:
H01L 21/00 (2006.01), H01L 21/687 (2006.01), G01N 21/95 (2006.01)
Applicants: ALTATECH SEMICONDUCTOR [FR/FR]; 611 rue Aristide Bergès F-38330 Montbonnot-Saint-Martin (FR) (For All Designated States Except US).
GASTALDO, Philippe [FR/FR]; (FR) (For US Only).
BERGER, François [FR/FR]; (FR) (For US Only).
SERRECCHIA, Cleonisse [FR/FR]; (FR) (For US Only)
Inventors: GASTALDO, Philippe; (FR).
BERGER, François; (FR).
SERRECCHIA, Cleonisse; (FR)
Agent: DE KERNIER, Gabriel; Cabinet Netter 36, avenue Hoche F-75008 Paris (FR)
Priority Data:
0802586 13.05.2008 FR
Title (EN) DEVICE AND METHOD FOR INSPECTING SEMICONDUCTOR WAFERS
(FR) DISPOSITIF ET PROCÉDÉ D' INSPECTION DE PLAQUETTES SEMI-CONDUCTRICES
Abstract: front page image
(EN)Semiconductor wafer inspection device (1) comprising a wafer transport arm (30) provided with at least one wafer support element, a wafer gripper (15), the gripper (15) having two distant branches (18, 19) designed to take hold of the opposed edges of the wafer, the gripper (15) being mounted so as to rotate on a shaft in order to be able to rotate the wafer between an approximately horizontal position and an approximately vertical position, and at least two inspection systems placed on one side of the wafer and on the other, in an approximately vertical position symmetrically with respect to the plane passing through the wafer.
(FR)Dispositif d'inspection (1) de plaquettes semi -conductrices comprenant un bras (30) de transport de plaquettes muni d'au moins un élément de support de plaquettes, une pince (15) de saisie de plaquettes, la pince (15) comprenant deux branches (18, 19) distantes configurées pour tenir des bords opposés de la plaquette, la pince (15) étant montée à rotation sur un arbre pour pouvoir tourner la plaquette entre une position sensiblement horizontale et une position sensiblement verticale, et au moins deux systèmes d'inspection disposés d'un côté et de l'autre de la plaquette en position sensiblement verticale, symétriquement par rapport au plan passant par la plaquette.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: French (FR)
Filing Language: French (FR)