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Machine translation
1. (WO2009139826) SUBSTRATE PROCESSING SYSTEMS AND RELATED METHODS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2009/139826    International Application No.:    PCT/US2009/002671
Publication Date: 19.11.2009 International Filing Date: 30.04.2009
IPC:
H01L 21/00 (2006.01), H01L 21/68 (2006.01)
Applicants: FSI INTERNATIONAL, INC. [US/US]; 3455 Lyman Boulevard Chaska, MN 55318 (US) (For All Designated States Except US).
CHRISTENSON, Kurt, K. [US/US]; (US) (For US Only)
Inventors: CHRISTENSON, Kurt, K.; (US)
Agent: PARINS, Paul, J.; Kagan Binder, PLLC Suite 200, Maple Island Building 221 Main Street North Stillwater, MN 55082 (US)
Priority Data:
61/127,288 12.05.2008 US
Title (EN) SUBSTRATE PROCESSING SYSTEMS AND RELATED METHODS
(FR) SYSTÈMES DE TRAITEMENT DE SUBSTRAT ET PROCÉDÉS ASSOCIÉS
Abstract: front page image
(EN)A system for processing one or more substrates according to the present invention includes a diversion valve that can deliver two or more process fluids to a dispensing device through a common line/pipe. The present invention also includes related methods.
(FR)Un système destiné au traitement d’un ou plusieurs substrats selon la présente invention renferme une vanne de dérivation qui peut délivrer deux liquides de traitement ou plus à un dispositif de distribution, par le biais d’une canalisation ou d’un tube communs. La présente invention concerne également des procédés associés.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)