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Machine translation
1. (WO2009136242) AN ANTIREFLECTIVE COATING COMPOSITION
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2009/136242    International Application No.:    PCT/IB2009/005147
Publication Date: 12.11.2009 International Filing Date: 30.03.2009
IPC:
G03F 7/075 (2006.01), G03F 7/09 (2006.01)
Applicants: AZ ELECTRONIC MATERIALS USA CORP. [US/US]; 70 Meister Avenue Somerville, NJ 08876 (US)
Inventors: MCKENZIE, Douglas; (US).
ABDALLAH, David; (US).
TIMKO, Allen, G.; (US).
RAHMAN, M., Dalil; (US)
Priority Data:
12/115,776 06.05.2008 US
Title (EN) AN ANTIREFLECTIVE COATING COMPOSITION
(FR) COMPOSITION DE REVÊTEMENT ANTIREFLET
Abstract: front page image
(EN)The invention relates to an anti reflective coating composition comprising a polymer, a crosslinker and a thermal acid generator, where the polymer comprises at least one unit of structure (1), at least one unit of structure (2) and at least one unit of structure (3), where R1 to R9 is independently selected from H and C1-C6 alkyl, R' and R" is independently selected from H and C1-C6 alkyl, X is C1-C6 alkylene, Y is C1-C6 alkylene. The invention further relates to a process for imaging a photoresist coated over the antireflective coating composition.
(FR)L'invention porte sur une composition de revêtement antireflet comprenant un polymère, un agent de réticulation et un générateur d'acide thermique, le polymère comprenant au moins une unité de structure (1), au moins une unité de structure (2) et au moins une unité de structure (3), dans lesquelles R1 à R9 sont indépendamment choisis parmi H et un groupe alkyle en C1-C6, R' et R'' sont indépendamment choisis parmi H et un groupe alkyle en C1-C6, X est un alkylène en C1-C6, Y est un alkylène en C1-C6. L'invention porte en outre sur un procédé pour imager un photorésist déposé sur la composition de revêtement antireflet.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)