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Machine translation
1. (WO2009134771) MOLYBDENUM-NIOBIUM ALLOYS, SPUTTERING TARGETS CONTAINING SUCH ALLOYS, METHODS OF MAKING SUCH TARGETS, THIN FILMS PREPARED THEREFROM AND USES THEREOF
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2009/134771    International Application No.:    PCT/US2009/041934
Publication Date: 05.11.2009 International Filing Date: 28.04.2009
IPC:
H01L 21/00 (2006.01)
Applicants: H. C. STARCK INC. [US/US]; 45 Industrial Place Newton, MA 02461-1951 (US) (For All Designated States Except US).
SUN, Shuwei [US/US]; (US) (For US Only).
KUMAR, Prabhat [US/US]; (US) (For US Only).
SCHMIDT-PARK, Olaf [DE/US]; (US) (For US Only).
WU, Rong-Chein, Richard [US/US]; (US) (For US Only).
ROZAK, Gary [US/US]; (US) (For US Only).
GAYDOS, Mark [US/US]; (US) (For US Only)
Inventors: SUN, Shuwei; (US).
KUMAR, Prabhat; (US).
SCHMIDT-PARK, Olaf; (US).
WU, Rong-Chein, Richard; (US).
ROZAK, Gary; (US).
GAYDOS, Mark; (US)
Agent: ETTELMAN, Aaron, R.; (US)
Priority Data:
61/125,753 28.04.2008 US
Title (EN) MOLYBDENUM-NIOBIUM ALLOYS, SPUTTERING TARGETS CONTAINING SUCH ALLOYS, METHODS OF MAKING SUCH TARGETS, THIN FILMS PREPARED THEREFROM AND USES THEREOF
(FR) ALLIAGES DE MOLYBDÈNE-NIOBIUM, CIBLES DE PULVÉRISATION CONTENANT DE TELS ALLIAGES, PROCÉDÉS DE FABRICATION DE TELLES CIBLES, FILMS MINCES PRÉPARÉS À PARTIR DE CELLES-CI ET LEURS UTILISATIONS
Abstract: front page image
(EN)Alloys comprising: (a) molybdenum present in a majority portion; (b) niobium present in an alloying amount; and (c) a third metal selected from the group consisting of nickel, chromium, titanium, zirconium, hafnium, vanadium and mixtures thereof, wherein the third metal is present in a doping amount; along with sputtering targets prepared therewith, films sputtered using such targets and thin film devices containing such films.
(FR)L'invention porte sur des alliages comprenant : (a) du molybdène présent en quantité majoritaire ; (b) du niobium présent dans une quantité d'alliage ; et (c) un troisième métal choisi dans le groupe constitué par le nickel, le chrome, le titane, le zirconium, l'hafnium, le vanadium et des mélanges de ceux-ci, le troisième métal étant présent dans une quantité de dopage. L'invention porte également sur des cibles de pulvérisation préparées avec ceux-ci, sur des films pulvérisés à l'aide de telles cibles et sur des dispositifs à couches minces contenant de tels films.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)