WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Search
 
Browse
 
Translate
 
Options
 
News
 
Login
 
Help
 
Machine translation
1. (WO2009134211) INORGANIC GRADED BARRIER FILM AND METHODS FOR THEIR MANUFACTURE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2009/134211    International Application No.:    PCT/SG2009/000154
Publication Date: 05.11.2009 International Filing Date: 28.04.2009
IPC:
B32B 15/01 (2006.01), C23C 14/08 (2006.01), C23C 14/35 (2006.01), C23C 14/00 (2006.01), C23C 14/34 (2006.01), H01L 21/203 (2006.01)
Applicants: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH [SG/SG]; 1 Fusionopolis Way #20-10 Connexis Singapore 138632 (SG) (For All Designated States Except US).
RAMADAS, Senthil Kumar [SG/SG]; (SG) (For US Only).
SHWE, Zin Ma [MM/SG]; (SG) (For US Only)
Inventors: RAMADAS, Senthil Kumar; (SG).
SHWE, Zin Ma; (SG)
Agent: SCHIWECK, Wolfram; (SG)
Priority Data:
61/048,822 29.04.2008 US
Title (EN) INORGANIC GRADED BARRIER FILM AND METHODS FOR THEIR MANUFACTURE
(FR) FILM BARRIÈRE GRADUÉ MINÉRAL ET SES PROCÉDÉS DE FABRICATION
Abstract: front page image
(EN)The present invention refers to a graded barrier film comprising a layered structure, wherein the layered structure comprises a first layer consisting of metal oxide; an intermediate layer consisting of metal nitride or metal oxynitride which is arranged on the first layer; and a third layer consisting of a metal oxide which is arranged on the intermediate layer. The present invention further refers to a sputtering method for manufacturing this graded barrier film and a device encapsulated with this graded barrier film.
(FR)La présente invention porte sur un film barrière gradué qui comporte une structure stratifiée, la structure stratifiée comportant une première couche consistant en un oxyde de métal ; une couche intermédiaire consistant en nitrure de métal ou oxynitrure de métal qui est agencée sur la première couche, et une troisième couche consistant en un oxyde de métal qui est agencée sur la couche intermédiaire. La présente invention porte en outre sur un procédé de pulvérisation cathodique pour fabriquer ce film barrière gradué et sur un dispositif encapsulé dans ce film barrière gradué.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)