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Machine translation
1. (WO2009132440) MEMS DEVICE WITH INDEPENDENT ROTATION IN TWO AXES OF ROTATION
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2009/132440    International Application No.:    PCT/CA2009/000565
Publication Date: 05.11.2009 International Filing Date: 29.04.2009
IPC:
B81B 7/02 (2006.01), B81B 3/00 (2006.01), B81B 5/00 (2006.01), G02B 26/08 (2006.01), H01L 23/52 (2006.01)
Applicants: MICRALYNE INC. [CA/CA]; 1911-94 Street Edmonton , Alberta T6N 1E6 (CA) (For All Designated States Except US).
KEYWORTH, Barrie [GB/CA]; (CA) (For US Only).
KORNELSEN, Kevin [CA/CA]; (CA) (For US Only).
CRAWFORD, Jared [CA/CA]; (CA) (For US Only)
Inventors: KEYWORTH, Barrie; (CA).
KORNELSEN, Kevin; (CA).
CRAWFORD, Jared; (CA)
Agent: SMART & BIGGAR; P.O. Box 2999, Station D 900-55 Metcalfe Street Ottawa , Ontario K1P 5Y6 (CA)
Priority Data:
61/048,724 29.04.2008 US
Title (EN) MEMS DEVICE WITH INDEPENDENT ROTATION IN TWO AXES OF ROTATION
(FR) DISPOSITIF DE MICROSYSTÈME ÉLECTROMÉCANIQUE (MEMS) PRÉSENTANT UNE ROTATION INDÉPENDANTE DANS DEUX AXES DE ROTATION
Abstract: front page image
(EN)A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the frame in a first axis of rotation. The frame is mounted so as to be rotatable with respect to a second axis of rotation. Rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation.
(FR)L’invention concerne un montage de microsystème électromécanique (MEMS) présentant un plan supérieur contenant un élément rotatif comme un miroir. Il existe un plan de structure de support intermédiaire et un plan de substrat électrique inférieur. L’élément rotatif est supporté par une structure de support formée dans le plan de structure de support intermédiaire de manière à pouvoir tourner par rapport à la structure dans un premier axe de rotation. La structure est montée de manière à pouvoir tourner par rapport à un second axe de rotation. La rotation dans le premier axe de rotation est sensiblement indépendante de la rotation dans le second axe de rotation.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)