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Machine translation
1. (WO2009132324) MEMS PACKAGE HAVING FORMED METAL LID
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2009/132324    International Application No.:    PCT/US2009/041743
Publication Date: 29.10.2009 International Filing Date: 27.04.2009
IPC:
B81B 7/02 (2006.01), H01L 23/02 (2006.01)
Applicants: TEXAS INSTRUMENTS INCORPORATED [US/US]; P.O. Box 655474, Mail Station 3999 Dallas, TX 75265-5474 (US) (For All Designated States Except US).
WACHTLER, Kurt, P. [US/US]; (US) (For US Only).
SHIH, Wei-Yan [US/US]; (US) (For US Only).
HOWARD, Gregory, E. [US/US]; (US) (For US Only)
Inventors: WACHTLER, Kurt, P.; (US).
SHIH, Wei-Yan; (US).
HOWARD, Gregory, E.; (US)
Agent: FRANZ, Warren, L.; (US)
Priority Data:
61/047,919 25.04.2008 US
12/337,320 17.12.2008 US
Title (EN) MEMS PACKAGE HAVING FORMED METAL LID
(FR) EMBALLAGE DE MEMS DOTÉ D’UN COUVERCLE MÉTALLIQUE MOULÉ
Abstract: front page image
(EN)A hermetic MEMS device (100) comprising a carrier (110) having a surface (111) including a device (101) and an attachment stripe (122), the stripe spaced from the device and surrounding the device; a metallic foil (102) having a central bulge portion (103) and a peripheral rim portion (104) meeting the stripe, the bulge cross section parallel to the carrier monotonically decreasing from the rim towards the bulge apex (105); and the foil positioned over the carrier surface so that the bulge arches over the device and the rim forms a seal with the stripe.
(FR)La présente invention concerne un dispositif MEMS hermétique (100) comprenant un support (110) doté d’une surface (111) comprenant un dispositif (101) et un filet de fixation (122), le filet se trouvant à une certaine distance du dispositif et entourant le dispositif ; une lame métallique (102) dotée d’une partie renflée centrale (103) et d’une partie de bordure périphérique (104) rencontrant le filet, la section transversale renflée parallèle au support se réduisant de façon régulière du bord vers le sommet du renflement (105) ; et la lame étant positionnée au-dessus de la surface de support de façon à ce que le renflement s’arque au-dessus du dispositif et que le rebord forme un joint étanche avec le filet.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)