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Machine translation
1. (WO2009128979) SPRING MEMBER FOR USE IN A MICROELECTROMECHANICAL SYSTEMS SENSOR
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2009/128979    International Application No.:    PCT/US2009/034085
Publication Date: 22.10.2009 International Filing Date: 13.02.2009
IPC:
G01P 15/08 (2006.01), B81B 7/02 (2006.01), B81B 7/00 (2006.01)
Applicants: FREESCALE SEMICONDUCTOR INC. [US/US]; 6501 William Cannon Drive West, Austin, Texas 78735 (US) (For All Designated States Except US).
GEISBERGER, Aaron, A. [CA/US]; (US) (For US Only)
Inventors: GEISBERGER, Aaron, A.; (US)
Agent: KING, Robert, L.; 7700 W. Parmer Lane, MD: TX32/PL02, Austin, TX 78729 (US)
Priority Data:
12/102,601 14.04.2008 US
Title (EN) SPRING MEMBER FOR USE IN A MICROELECTROMECHANICAL SYSTEMS SENSOR
(FR) ÉLÉMENT DE RESSORT DESTINÉ À ÊTRE UTILISÉ DANS UN CAPTEUR DE SYSTÈMES MICROÉLECTROMÉCANIQUES
Abstract: front page image
(EN)A device (96) includes a microelectromechanical (MEMS) sensor (40). The sensor (40) includes a movable element (42) adapted for motion in a direction (44) and an anchor (46) coupled to a substrate (48). The MEMS sensor (40) further includes spring members (50) interconnected between the movable element (42) and the anchor (46). Each of the spring members (50) includes beams (56, 58, 60) arranged in substantially parallel alignment, with the beam (60) positioned between the other beams (56, 58). Each of the beams (56, 58) is coupled to the anchor (46) and the beam (60) is coupled to the movable element (42). Each of the spring members (50) further includes a support structure (64) joined with the beams (56, 58) to provide vertical stiffness to the beams (56, 58) of the spring member (50).
(FR)L'invention porte sur un dispositif (96) comprenant un capteur microélectromécanique (MEMS) (40). Le capteur (40) comprend un élément mobile (42) apte à se déplacer dans une direction (44) et une ancre (46) couplée à un substrat (48). Le capteur MEMS (40) comprend en outre des éléments de ressort (50), interconnectés entre l'élément mobile (42) et l'ancre (46). Chacun des éléments de ressort (50) comprend des poutres (56, 58, 60) disposées selon un alignement sensiblement parallèle, la poutre (60) étant positionnée entre les autres poutres (56, 58). Chacune des poutres (56, 58) est couplée à l'ancre (46), et la poutre (60) est couplée à l'élément mobile (42). Chacun des éléments de ressort (50) comprend en outre une structure de soutènement (64) réunie aux poutres (56, 58), pour conférer une rigidité verticale aux poutres (56, 58) de l'élément de ressort (50).
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)