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1. (WO2009128048) TUNABLE CAPACITOR AND SWITCH USING MEMS WITH PHASE CHANGE MATERIAL

Pub. No.:    WO/2009/128048    International Application No.:    PCT/IB2009/051606
Publication Date: Oct 22, 2009 International Filing Date: Apr 17, 2009
IPC: H01G 5/18
H01L 21/00
H01H 59/00
B81C 1/00
Applicants: NXP B.V.
FURUKAWA, Yukiko
REIMANN, Klaus
RENDERS, Christina, Adriana
STEENEKEN, Peter, Gerard
VAN PIETERSON, Liesbeth
LIU, Jin
JEDEMA, Friso, Jacobus
Inventors: FURUKAWA, Yukiko
REIMANN, Klaus
RENDERS, Christina, Adriana
STEENEKEN, Peter, Gerard
VAN PIETERSON, Liesbeth
LIU, Jin
JEDEMA, Friso, Jacobus
Title: TUNABLE CAPACITOR AND SWITCH USING MEMS WITH PHASE CHANGE MATERIAL
Abstract:
The present invention relates to a MEMS, being developed for e.g. a mobile communication application, such as switch, tunable capacitor, tunable filter, phase shifter, multiplexer, voltage controlled oscillator, and tunable matching network. The volume change of phase-change layer is used for a bi-stable actuation of the MEMS device. The MEMS device comprises at least a bendable cantilever, a phase change layer, and electrodes. A process to implement this device and a method for using is given.