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Machine translation
1. (WO2009126148) A METHOD OF MONITORING A SURFACTANT IN A MICROELECTRONIC PROCESS BY ABSORBANCE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2009/126148    International Application No.:    PCT/US2008/059644
Publication Date: 15.10.2009 International Filing Date: 08.04.2008
IPC:
H01L 21/66 (2006.01)
Applicants: NALCO COMPANY [US/US]; 1601 W. Diehl Road, Naperville, Illinois 60563-1198 (US) (For All Designated States Except US).
TSENG, Amy M. [US/US]; (US) (For US Only).
HOOTS, John E. [US/US]; (US) (For US Only).
JENKINS, Brian V. [US/US]; (US) (For US Only)
Inventors: TSENG, Amy M.; (US).
HOOTS, John E.; (US).
JENKINS, Brian V.; (US)
Agent: DIMATTIA, Peter A.; Nalco Company, 1601 W. Diehl Road, Naperville, Illinois 60563-1198 (US)
Priority Data:
Title (EN) A METHOD OF MONITORING A SURFACTANT IN A MICROELECTRONIC PROCESS BY ABSORBANCE
(FR) PROCÉDÉ DE SURVEILLANCE D'UN AGENT TENSIO-ACTIF DANS UN TRAITEMENT MICROÉLECTRONIQUE PAR ABSORBANCE
Abstract: front page image
(EN)A method of monitoring a surfactant in a microelectronic process is disclosed. Specifically, the monitoring of a surfactant occurs by studying the absorbance of a sample collected from a microelectronic process.
(FR)L'invention porte sur un procédé de surveillance d'un agent tensio-actif dans un traitement microélectronique. De manière spécifique, la surveillance d'un agent tensio-actif se produit par étude de l'absorbance d'un échantillon recueilli à partir d'un traitement microélectronique.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)