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1. (WO2009123120) GAS FILTER AND GAS FEEDER

Pub. No.:    WO/2009/123120    International Application No.:    PCT/JP2009/056509
Publication Date: Oct 8, 2009 International Filing Date: Mar 30, 2009
IPC: B03C 3/30
B01D 46/00
B01D 50/00
B03C 3/155
B03C 3/40
B03C 3/49
Applicants: TOKYO ELECTRON LIMITED
東京エレクトロン株式会社
MORIYA, Shuji
守谷 修司
Inventors: MORIYA, Shuji
守谷 修司
Title: GAS FILTER AND GAS FEEDER
Abstract:
A gas filter having low possibility of prevention of mixing and capable of capturing particles contained in a gas by easily and inexpensively charging the particles; and a gas feeder. The end filter (9) comprises a base (91) having a gas inlet (91c) and a gas outlet (91d) through which the gas flows, a storage cylinder (92) which forms a casing when screwed to the base (91), and a filter member (93) which is so stored in the base (91) and the storage cylinder (92) as to isolate the gas inlet (91c) from the gas outlet (91d) and which captures the particles contained in the gas flowing thereinto through the gas inlet (91c). A particle charging board (96) in which a charging hole (96a) for charging the particles contained in the gas by allowing the gas to flow therethrough is formed is provided at the gas inlet (91c) of the base (91). The end filter (9) is installed in the gas feeder.