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Machine translation
1. (WO2009120804) IMPROVED PAD PROPERTIES USING NANOPARTICLE ADDITIVES
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2009/120804 International Application No.: PCT/US2009/038296
Publication Date: 01.10.2009 International Filing Date: 25.03.2009
IPC:
H01L 21/304 (2006.01) ,B24D 11/00 (2006.01)
Applicants: M'SAAD, Hichem[US/US]; US (UsOnly)
KARUPPIAH, Lakshmanan[US/US]; US (UsOnly)
CHEN, Hung[US/US]; US (UsOnly)
OH, Jeonghoon[US/US]; US (UsOnly)
LUM, Robert[US/US]; US (UsOnly)
TSAI, Stan[CA/US]; US (UsOnly)
CONCEICAO, Cassio[US/US]; US (UsOnly)
BHATNAGGAR, Ashish[US/US]; US (UsOnly)
PERRY, Michael[US/US]; US (UsOnly)
NARENDRNATH, Kadthala[US/US]; US (UsOnly)
SHACHAM-DIAMAND, Yosi[IL/US]; US (UsOnly)
APPLIED MATERIALS, INC.[US/US]; 3050 Bowers Avenue Santa Clara, CA 95054, US (AllExceptUS)
Inventors: M'SAAD, Hichem; US
KARUPPIAH, Lakshmanan; US
CHEN, Hung; US
OH, Jeonghoon; US
LUM, Robert; US
TSAI, Stan; US
CONCEICAO, Cassio; US
BHATNAGGAR, Ashish; US
PERRY, Michael; US
NARENDRNATH, Kadthala; US
SHACHAM-DIAMAND, Yosi; US
Agent: PATTERSON, B., Todd; US
Priority Data:
61/040,53428.03.2008US
Title (EN) IMPROVED PAD PROPERTIES USING NANOPARTICLE ADDITIVES
(FR) PROPRIÉTÉS DE TAMPON AMÉLIORÉES UTILISANT DES ADDITIFS DE NANOPARTICULE
Abstract: front page image
(EN) A method for forming a polishing media and an article of manufacture is described. The article of manufacture may be formed into a polishing article. The polishing article includes a polymer base material and a plurality of nano-scale structures disposed in or on the polymer base material.
(FR) La présente invention concerne un procédé de formation d’un milieu de polissage et d’un article de fabrication. L’article de fabrication peut être formé en un article de polissage. L’article de polissage comprend un matériau de base polymère et une pluralité de structures d’échelle nanométrique disposés dans ou sur le matériau de base polymère.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (EPO) (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)