Some content of this application is unavailable at the moment.
If this situation persist, please contact us atFeedback&Contact
1. (WO2009067688) SYSTEMS AND METHODS FOR PREPARING EPITAXIALLY TEXTURED POLYCRYSTALLINE FILMS
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2009/067688 International Application No.: PCT/US2008/084389
Publication Date: 28.05.2009 International Filing Date: 21.11.2008
IPC:
H01L 21/20 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
04
the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
18
the devices having semiconductor bodies comprising elements of the fourth group of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
20
Deposition of semiconductor materials on a substrate, e.g. epitaxial growth
Applicants:
THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OF NEW YORK [US/US]; 412 Low Memorial Library 535 West 116th Street New York, NY 10027, US (AllExceptUS)
IM, James, S. [US/US]; US (UsOnly)
Inventors:
IM, James, S.; US
Agent:
BIFANO, Larissa, S. ; Wilmer Cutler Pickering Hale And Dorr LLP 60 State Street Boston, MA 02109, US
Priority Data:
60/989,71921.11.2007US
Title (EN) SYSTEMS AND METHODS FOR PREPARING EPITAXIALLY TEXTURED POLYCRYSTALLINE FILMS
(FR) SYSTÈMES ET PROCÉDÉS DE PRÉPARATION DE FILMS POLYCRISTALLINS TEXTURÉS PAR ÉPITAXIE
Abstract:
(EN) The disclosed subject matter relates to systems and methods for preparing epitaxially textured poly crystalline films. In one or more embodiments, the method for making a textured thin film includes providing a precursor film on a substrate, the film includes crystal grains having a surface texture and a non-uniform degree of texture throughout the thickness of the film, wherein at least a portion of the this substrate is transparent to laser irradiation; and irradiating the textured precursor film through the substrate using a pulsed laser crystallization technique at least partially melt the film wherein the irradiated film crystallizes upon cooling to form crystal grains having a uniform degree of texture.
(FR) L'invention concerne des systèmes et des procédés de préparation de films polycristallins texturés par épitaxie. Dans un ou plusieurs modes de réalisation, le procédé de fabrication d'un film mince texturé comprend les étapes qui consistent à prévoir un film de précurseur sur un substrat, le film contenant des grains cristallins ayant une texture de surface et un degré de texturation non uniforme dans l'épaisseur du film, au moins une partie de ce substrat étant transparente au rayonnement laser ; et à irradier le film de précurseur texturé à travers le substrat en utilisant une technique de cristallisation par laser pulsé pour faire fondre le film au moins en partie, le film irradié cristallisant lors de son refroidissement pour former des grains cristallins qui ont un degré de texturation uniforme.
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)