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Machine translation
1. (WO2009066983) METHOD OF CURING DEFECTS IN SPIN-ON-GLASS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2009/066983    International Application No.:    PCT/MY2008/000148
Publication Date: 28.05.2009 International Filing Date: 21.11.2008
IPC:
H01L 21/208 (2006.01), H01L 21/31 (2006.01)
Applicants: MIMOS BERHAD [MY/MY]; Technology Park Malaysia, Bukit Jalil, 57000 Kuala Lumpur (MY) (For All Designated States Except US).
MOHD ZAINI, Khairil Mazwan [MY/MY]; (MY) (For US Only).
MOHD SAMAN, Rahimah [MY/MY]; (MY) (For US Only).
ABDUL RASHID, Nora'zah [MY/MY]; (MY) (For US Only)
Inventors: MOHD ZAINI, Khairil Mazwan; (MY).
MOHD SAMAN, Rahimah; (MY).
ABDUL RASHID, Nora'zah; (MY)
Agent: SIAW, Timothy; Shearn Delamore & Co., 7th Floor, Wisma Hamzah-Kwong Hing, No. 1, Leboh Ampang, 50100 Kuala Lumpur (MY)
Priority Data:
PI 20072057 21.11.2007 MY
Title (EN) METHOD OF CURING DEFECTS IN SPIN-ON-GLASS
(FR) PROCÉDÉ DE TRAITEMENT DE DÉFAUTS DANS LE VERRE DÉPOSÉ PAR CENTRIFUGATION
Abstract: front page image
(EN)The present invention relates to a method of curing defects in a spin-on-glass more particularly bubble defects on the spin-on-glass. The advantage of the present invention is eliminate o reduce bubble effects on all the layers of SOG i.e. the first layer of SOG and the second and subsequent layers of SOG.
(FR)La présente invention porte sur un procédé de traitement de défauts dans un verre déposé par centrifugation, plus particulièrement de défauts de type bulles sur le verre déposé par centrifugation. L'avantage de la présente invention est d'éliminer ou de réduire les défauts de type bulles sur toutes les couches de verre déposé par centrifugation (SOG), à savoir la première couche de SOG et la seconde couche et les couches suivantes de SOG.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)