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1. (WO2009066573) CONVEYANCE ROBOT, LOCALLY CLEANED HOUSING WITH THE CONVEYANCE ROBOT, AND SEMICONDUCTOR MANUFACTURING DEVICE WITH THE HOUSING
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2009/066573    International Application No.:    PCT/JP2008/070395
Publication Date: 28.05.2009 International Filing Date: 10.11.2008
IPC:
H01L 21/677 (2006.01)
Applicants: KABUSHIKI KAISHA YASKAWA DENKI [JP/JP]; 2-1, Kurosaki-shiroishi, Yahatanishi-ku, Kitakyushu-shi Fukuoka 8060004 (JP) (For All Designated States Except US).
UMEZAKI, Takahiro; (For US Only).
SHIMADA, Katsuhiko; (For US Only).
YAMAMOTO, Hideo; (For US Only)
Inventors: UMEZAKI, Takahiro; .
SHIMADA, Katsuhiko; .
YAMAMOTO, Hideo;
Priority Data:
2007-302103 21.11.2007 JP
Title (EN) CONVEYANCE ROBOT, LOCALLY CLEANED HOUSING WITH THE CONVEYANCE ROBOT, AND SEMICONDUCTOR MANUFACTURING DEVICE WITH THE HOUSING
(FR) ROBOT DE TRANSPORT, BOÎTIER NETTOYÉ LOCALEMENT MUNI DU ROBOT DE TRANSPORT ET DISPOSITIF DE FABRICATION DE COMPOSANTS À SEMI-CONDUCTEUR MUNI DU BOÎTIER
(JA) 搬送ロボット、それを備えた局所クリーン化された筐体、及びそれを備えた半導体製造装置
Abstract: front page image
(EN)A conveyance robot suitable for mounting on a locally cleaned housing. The conveyance robot has a body (14) having a thin plate (28), a lifting mechanism (20), and a movement unit (48). The thin plate (28) has an upper end located below the lowermost part of a first arm (12) and has a vertical surface provided with a fixation section (49) to which the conveyance robot (8) is fixed in a vertical position. The lifting mechanism (20) is provided on the vertical surface. The movement unit (48) rotatably supports the first arm (12) and can be lifted and lowered by the lifting mechanism (20) along the vertical surface.
(FR)L'invention porte sur un robot de transport approprié à un montage sur un boîtier nettoyé localement. Le robot de transport comporte un corps (14) muni d'une plaque mince (28), d'un mécanisme de levage (20) et d'une unité de mouvement (48). La plaque mince (28) présente une extrémité supérieure placée sous la partie la plus basse d'un premier bras (12) et une surface verticale pourvue d'une section de fixation (49) à laquelle le robot de transport (8) est fixé dans une position verticale. Le mécanisme de levage (20) est installé sur la surface verticale. L'unité de mouvement (48) supporte en rotation le premier bras (12) et peut être élevée et abaissée le long de la surface verticale par le mécanisme de levage (20).
(JA) 局所クリーンの筐体に設置するのに最適な搬送ロボットを構成すること。  胴体(14)が、上端が第1アーム(12)の最下部より下方となるよう位置するとともに、搬送ロボット(8)が垂直になるよう固定させる固定部(49)が設けられた垂直面を有する薄板状のプレート(28)と、垂直面に設けられた昇降機構(20)と、第1アーム(12)を回転自在に支持し、昇降機構(20)によって垂直面を昇降可能な移動ユニット(48)と、から構成された搬送ロボットとした。
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)