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Machine translation
1. (WO2009064103) THE MINUTE MEASURING INSTRUMENT FOR HIGH SPEED AND LARGE AREA AND THE METHOD OF THEREOF
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2009/064103    International Application No.:    PCT/KR2008/006641
Publication Date: 22.05.2009 International Filing Date: 11.11.2008
IPC:
G01B 11/06 (2006.01)
Applicants: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE [KR/KR]; 1, Doryong-dong, Yuseong-gu, Daejeon 305-340 (KR) (For All Designated States Except US).
CHO, Yong Jai [KR/KR]; (KR) (For US Only).
CHEGAL, Won [KR/KR]; (KR) (For US Only).
CHO, Hyun Mo [KR/KR]; (KR) (For US Only)
Inventors: CHO, Yong Jai; (KR).
CHEGAL, Won; (KR).
CHO, Hyun Mo; (KR)
Agent: KWON, Oh-Sig; 4F, Jooeunleaderstel, 921, Dunsan-dong, Seo-gu, Daejeon 302-120 (KR)
Priority Data:
10-2007-0116340 14.11.2007 KR
Title (EN) THE MINUTE MEASURING INSTRUMENT FOR HIGH SPEED AND LARGE AREA AND THE METHOD OF THEREOF
(FR) INSTRUMENT DE MESURE MINUTIEUSE DESTINÉ À DES GRANDES VITESSES ET À DES ZONES DE GRANDES DIMENSIONS ET PROCÉDÉ CORRESPONDANT
Abstract: front page image
(EN)The present invention relates to a minute measuring instrument for high speed and large area and a method thereof, and more particularly, to a minute measuring instrument for high speed and large area which measures properties of a specimen in high speed by a focused-beam ellipsometric part and then minutely remeasures the position showing a singular point by a minute measuring part and a method thereof.
(FR)L'invention concerne un instrument de mesure minutieuse destiné à des grandes vitesses et à des zones de grandes dimensions ainsi qu'un procédé correspondant, et plus particulièrement, un instrument de mesure minutieuse destiné à des grandes vitesses et à des zones de grandes dimensions qui mesure les propriétés d'un échantillon à grande vitesse au moyen d'un élément ellipsométrique à faisceau concentré, puis remesure minutieusement la position présentant un point singulier au moyen d'un élément de mesure minutieuse et d'un procédé correspondant.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: Korean (KO)