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1. (WO2009060319) METHOD AND APPARATUS FOR DERIVING AN ISO-DENSE BIAS AND CONTROLLING A FABRICATION PROCESS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2009/060319    International Application No.:    PCT/IB2008/003804
Publication Date: 14.05.2009 International Filing Date: 30.10.2008
IPC:
H01L 21/66 (2006.01), G01B 11/30 (2006.01), G01N 21/95 (2006.01), G01N 23/20 (2006.01)
Applicants: TOKYO ELECTRON LIMITED [JP/JP]; Akasaka Biz Tower, 3-1, Akasaka 5-chome, Minato-ku, Tokyo 107-6325 (JP) (For All Designated States Except US).
BISCHOFF, Joerg [DE/DE]; (DE) (For US Only).
WEICHERT, Heiko; (DE) (For US Only)
Inventors: BISCHOFF, Joerg; (DE).
WEICHERT, Heiko; (DE)
Priority Data:
11/936,747 07.11.2007 US
11/936,759 07.11.2007 US
11/936,769 07.11.2007 US
Title (EN) METHOD AND APPARATUS FOR DERIVING AN ISO-DENSE BIAS AND CONTROLLING A FABRICATION PROCESS
(FR) PROCÉDÉ ET APPAREIL POUR DÉRIVER UNE POLARISATION ISO-DENSE ET CONTRÔLER UN PROCESSUS DE FABRICATION
Abstract: front page image
(EN)Embodiments of controlling a fabrication process using an iso-dense bias are generally described herein. Other embodiments may be described and claimed.
(FR)L'invention concerne, dans certains modes de réalisation, le contrôle d'un processus de fabrication utilisant une polarisation iso-dense. D'autres modes de réalisation peuvent être décrits et revendiqués.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)