WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Search
 
Browse
 
Translate
 
Options
 
News
 
Login
 
Help
 
Machine translation
1. (WO2009058272) COPPER CMP POLISHING PAD CLEANING COMPOSITION COMPRISING OF AMIDOXIME COMPOUNDS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2009/058272    International Application No.:    PCT/US2008/012234
Publication Date: 07.05.2009 International Filing Date: 29.10.2008
IPC:
B24B 53/007 (2006.01), C11D 3/32 (2006.01), C11D 7/32 (2006.01), C11D 11/00 (2006.01), H01L 21/321 (2006.01), H01L 21/02 (2006.01)
Applicants: EKC TECHNOLOGY, INC. [US/US]; 2520 Barrington Court, Hayward, CA 94545-1163 (US) (For All Designated States Except US).
LEE, Wai, Mun [US/US]; (US) (For US Only)
Inventors: LEE, Wai, Mun; (US)
Agent: SULLIVAN, Mark, J.; Morgan Lewis & Bockius LLP, 1111 Pennsylvania, NW, Washington, DC 20004 (US)
Priority Data:
61/000,727 29.10.2007 US
61/006,227 31.12.2007 US
Title (EN) COPPER CMP POLISHING PAD CLEANING COMPOSITION COMPRISING OF AMIDOXIME COMPOUNDS
(FR) COMPOSITION NETTOYANTE POUR TAMPON DE POLISSAGE CMP DU CUIVRE, COMPRENANT DES COMPOSÉS AMIDOXIME
Abstract: front page image
(EN)The present invention relates to methods of using amidoxime compositions for cleaning polishing pads, particularly after chemical mechanical planarization or polishing is provided. A polishing pad is cleaned of Cu CMP by-products, subsequent to or during planarizing a wafer, to reduce pad-glazing by applying to the polishing pad surface a composition comprising an aqueous amidoxime compound solution in water.
(FR)La présente invention concerne des procédés d'utilisation de compositions à base d'amidoxime pour le nettoyage de tampons de polissage, notamment après une planarisation ou un polissage mécano-chimique. Un tampon de polissage est nettoyé par enlèvement des sous-produits de CMP contenant du cuivre, après ou pendant la planarisation d'une plaquette, en vue d'une réduction du lissage du tampon. A cet effet, on applique sur la surface du tampon de polissage, une composition comprenant une solution aqueuse renfermant des composés amidoxime dans de l'eau.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)