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1. (WO2009057822) OPTICAL UNIT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2009/057822    International Application No.:    PCT/JP2008/070253
Publication Date: 07.05.2009 International Filing Date: 30.10.2008
IPC:
G03F 7/20 (2006.01)
Applicants: NIKON CORPORATION [JP/JP]; 2-3, Marunouchi 3-chome, Chiyoda-ku, Tokyo, 1008331 (JP) (For All Designated States Except US).
TANITSU, Osamu [JP/JP]; (JP) (For US Only)
Inventors: TANITSU, Osamu; (JP)
Agent: HASEGAWA, Yoshiki; SOEI PATENT AND LAW FIRM, Ginza First Bldg., 10-6, Ginza 1-chome, Chuo-ku, Tokyo, 1040061 (JP)
Priority Data:
2007-282539 31.10.2007 JP
2008-135020 23.05.2008 JP
Title (EN) OPTICAL UNIT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
(FR) UNITÉ OPTIQUE, APPAREIL D'ÉCLAIRAGE OPTIQUE, APPAREIL D'EXPOSITION, PROCÉDÉ D'EXPOSITION ET PROCÉDÉ DE FABRICATION DE DISPOSITIF
Abstract: front page image
(EN)An optical unit (3) comprises a first optical path in which a spatial light modulator (36) with a plurality of optical elements (36a) arranged two-dimensionally and controlled individually can be arranged; a second optical path including a mechanism for insertion of an angle distribution providing element (5) including a predetermined fixed pattern on a surface thereof; and a third optical path being an optical path of light having traveled through both of the first optical path and the second optical path. When the angle distribution providing element (5) is inserted in the second optical path, an angle distribution is provided to light exited based on light incident to the angle distribution providing element (5).
(FR)L'invention porte sur une unité optique (3) qui comprend : un premier trajet optique dans lequel peut être agencé un modulateur spatial de lumière (36) muni d'une pluralité d'éléments optiques (36a) disposés en deux dimensions et commandés individuellement; un second trajet optique qui comprend un mécanisme permettant l'insertion d'un élément de distribution angulaire (5) dont la surface comporte un motif fixe prédéterminé; et un troisième trajet optique qui constitue le trajet optique d'une lumière qui a voyagé le long du premier trajet optique et du second trajet optique. Lorsque l'on insère l'élément de distribution angulaire (5) dans le second trajet optique, on obtient une distribution angulaire de la lumière qui sort sur la base de la lumière incidente sur l'élément de distribution angulaire (5).
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)