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Machine translation
1. (WO2009056173) METHOD FOR MANUFACTURING A TREATED SURFACE AND VACUUM PLASMA SOURCES
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2009/056173    International Application No.:    PCT/EP2007/061805
Publication Date: 07.05.2009 International Filing Date: 01.11.2007
IPC:
H01J 37/32 (2006.01)
Applicants: OERLIKON TRADING AG, TRÜBBACH [CH/CH]; CH-9477 Trübbach (CH) (For All Designated States Except US).
RAMM, Juergen [DE/CH]; (CH) (For US Only).
WIDRIG, Beno [CH/CH]; (CH) (For US Only).
KURAPOV, Denis [RU/CH]; (CH) (For US Only)
Inventors: RAMM, Juergen; (CH).
WIDRIG, Beno; (CH).
KURAPOV, Denis; (CH)
Agent: TROESCH, Jacques, J.; Troesch Scheidegger Werner AG Schwäntenmos 14 CH-8126 Zumikon (CH)
Priority Data:
Title (EN) METHOD FOR MANUFACTURING A TREATED SURFACE AND VACUUM PLASMA SOURCES
(FR) PROCÉDÉ DE FABRICATION D'UNE SURFACE TRAITÉE ET DE SOURCES DE PLASMA SOUS VIDE
Abstract: front page image
(EN)When treating workpiece or substrate surfaces with the help of a vacuum plasma discharge between an anode (9) and an cathode (7= and whereby due to such treatment a solid (19) is formed and deposited on the anode surface (21), which solid has a higher specific DC impedance than the specific DC impedance of the anode material, at least parts of the anode surface are shielded from such deposition by establishing thereat a shielding plasma (25).
(FR)Lors du traitement de surfaces d'une pièce ou d'un substrat à l'aide d'une décharge de plasma sous vide entre une anode (9) et une cathode (7), en raison dudit traitement, un solide (19) se forme et se dépose sur la surface de l'anode (21), ledit solide ayant une impédance CC spécifique supérieure à l'impédance CC spécifique du matériau de l'anode, et au moins des parties de la surface de l'anode sont protégées contre ledit dépôt en établissant au niveau de celle-ci un plasma de protection (25).
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, MT, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)