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1. WO2009055145 - METHOD FOR FABRICATING A HEATER CAPABLE OF ADJUSTING REFRACTIVE INDEX OF AN OPTICAL WAVEGUIDE

Publication Number WO/2009/055145
Publication Date 30.04.2009
International Application No. PCT/US2008/074718
International Filing Date 29.08.2008
IPC
G02B 6/10 2006.01
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
10of the optical waveguide type
CPC
G02B 6/10
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6Light guides
10of the optical waveguide type
G02B 6/12033
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6Light guides
10of the optical waveguide type
12of the integrated circuit kind
12007forming wavelength selective elements, e.g. multiplexer, demultiplexer
12009comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
12033characterised by means for configuring the device, e.g. moveable element for wavelength tuning
G02F 1/011
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour 
011in optical waveguides, not otherwise provided for in this subclass
G02F 1/0147
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour 
0147based on thermo-optic effects
Applicants
  • BAE SYSTEMS INFORMATION AND ELECTRONIC SYSTEMS INTEGRATION INC. [US]/[US] (AllExceptUS)
  • POMERENE, Andrew, Ts [US]/[US] (UsOnly)
  • CONWAY, Timothy, J. [US]/[US] (UsOnly)
  • HILL, Craig, M. [US]/[US] (UsOnly)
  • ISHII, Jonathan, N. [US]/[US] (UsOnly)
  • CAROTHERS, Daniel, N. [US]/[US] (UsOnly)
  • MCINTYRE, Thomas, J. [US]/[US] (UsOnly)
Inventors
  • POMERENE, Andrew, Ts
  • CONWAY, Timothy, J.
  • HILL, Craig, M.
  • ISHII, Jonathan, N.
  • CAROTHERS, Daniel, N.
  • MCINTYRE, Thomas, J.
Agents
  • NG, Antony, P.
Priority Data
61/000,34524.10.2007US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) METHOD FOR FABRICATING A HEATER CAPABLE OF ADJUSTING REFRACTIVE INDEX OF AN OPTICAL WAVEGUIDE
(FR) PROCÉDÉ DE FABRICATION D'UN ÉLÉMENT CHAUFFANT APTE À AJUSTER L'INDICE DE RÉFRACTION D'UN GUIDE D'ONDES OPTIQUES
Abstract
(EN)
A method for fabricating a thermal optical heating element capable of adjusting refractive index of an optical waveguide is disclosed. A silicon block is initially formed on a cladding layer on a silicon substrate. The silicon block is located in close proximity to an optical waveguide. A cobalt layer is deposited on the silicon block. The silicon block is then annealed to cause the cobalt layer to react with the silicon block to form a cobalt suicide layer. The silicon block is again annealed to cause the cobalt suicide layer to transform into a cobalt di-silicide layer.
(FR)
L'invention porte sur un procédé de fabrication d'un élément chauffant optique thermique capable d'ajuster l'indice de réfraction d'un guide d'ondes optiques. Un bloc de silicium est initialement formé sur une couche d'un substrat de silicium. Le bloc de silicium est disposé à proximité étroite du guide d'ondes optiques. Une couche de cobalt est déposée sur le bloc de silicium. Le bloc de silicium est ensuite recuit afin d'amener la couche de cobalt à réagir avec le bloc de silicium pour former une couche de siliciure de cobalt. Le bloc de silicium est à nouveau recuit pour amener la couche de siliciure de cobalt à se transformer en une couche de disiliciure de cobalt.
Also published as
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