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1. WO2009014357 - CONCENTRIC BUCKLING BASED VERTICAL PROBE AND ITS FABRICATION METHOD

Publication Number WO/2009/014357
Publication Date 29.01.2009
International Application No. PCT/KR2008/004237
International Filing Date 21.07.2008
IPC
H01L 21/66 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
66Testing or measuring during manufacture or treatment
CPC
G01R 1/06733
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
02General constructional details
06Measuring leads; Measuring probes
067Measuring probes
06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
06733Geometry aspects
G01R 1/07357
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
02General constructional details
06Measuring leads; Measuring probes
067Measuring probes
073Multiple probes
07307with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
07357with flexible bodies, e.g. buckling beams
Applicants
  • KOREA INSTITUTE OF MACHINERY & MATERIALS [KR]/[KR] (AllExceptUS)
  • KIM, Jae-Hyun [KR]/[KR] (UsOnly)
  • LEE, Hak-Joo [KR]/[KR] (UsOnly)
  • KIM, Jung-Yup [KR]/[KR] (UsOnly)
  • CHOI, Byung-Ik [KR]/[KR] (UsOnly)
  • HAN, Seung-Woo [KR]/[KR] (UsOnly)
  • HYUN, Seung-Min [KR]/[KR] (UsOnly)
Inventors
  • KIM, Jae-Hyun
  • LEE, Hak-Joo
  • KIM, Jung-Yup
  • CHOI, Byung-Ik
  • HAN, Seung-Woo
  • HYUN, Seung-Min
Agents
  • LEE, Soo-Wan
Priority Data
10-2007-007457025.07.2007KR
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) CONCENTRIC BUCKLING BASED VERTICAL PROBE AND ITS FABRICATION METHOD
(FR) SONDE VERTICALE À FLÉCHISSEMENT CONCENTRIQUE ET PROCÉDÉ DE FABRICATION DE CELLE-CI
Abstract
(EN)
The present invention relates to a vertical probe and its fabrication method wherein the vertical probe is configured in a concentric pattern such that large elastic deformation can be made in a vertical direction and a simple fabrication process can also be performed. According to the present invention, there is provided a vertical probe for use in testing whether a semiconductor device normally operates by applying an electrical signal to the device, wherein one or more cylindrical structures are arranged in a concentric pattern and are subjected to concentric elastic buckling when longitudinal load is applied thereto.
(FR)
L'invention concerne une sonde verticale et un procédé de fabrication de celle-ci. Cette sonde verticale, qui est conçue de manière à présenter un motif concentrique permettant une grande déformation élastique dans le sens vertical, peut être produite à l'aide d'un procédé de fabrication simple. L'invention concerne une sonde verticale s'utilisant dans des essais pour vérifier si un dispositif semi-conducteur fonctionne normalement, par l'application d'un signal électrique sur le dispositif, une ou plusieurs structures cylindriques aménagées selon un motif concentrique étant soumises à un fléchissement élastique concentrique lors de l'application d'une charge longitudinale.
Also published as
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