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1. WO2009012849 - PLASMA SUPPLY DEVICE AND METHOD FOR OPERATION OF A FULL BRIDGE OF A PLASMA SUPPLY DEVICE

Publication Number WO/2009/012849
Publication Date 29.01.2009
International Application No. PCT/EP2008/004651
International Filing Date 11.06.2008
IPC
H01J 37/32 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes
CPC
G01R 21/06
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
21Arrangements for measuring electric power or power factor
06by measuring current and voltage
G01R 23/02
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
23Arrangements for measuring frequencies; Arrangements for analysing frequency spectra
02Arrangements for measuring frequency, e.g. pulse repetition rate
H01J 37/32045
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
32018Glow discharge
32045Circuits specially adapted for controlling the glow discharge
H02M 7/003
HELECTRICITY
02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
7Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
003Constructional details, e.g. physical layout, assembly, wiring, busbar connections
H02M 7/5383
HELECTRICITY
02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
7Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
42Conversion of dc power input into ac power output without possibility of reversal
44by static converters
48using discharge tubes with control electrode or semiconductor devices with control electrode
53using devices of a triode or transistor type requiring continuous application of a control signal
537using semiconductor devices only, e.g. single switched pulse inverters
5383in a self-oscillating arrangement
H03H 7/40
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
7Multiple-port networks comprising only passive electrical elements as network components
38Impedance-matching networks
40Automatic matching of load impedance to source impedance
Applicants
  • HÜTTINGER ELEKTRONIK GMBH + CO. KG [DE]/[DE] (AllExceptUS)
  • KIRCHMEIER, Thomas [DE]/[DE] (UsOnly)
  • GLÜCK, Michael [DE]/[DE] (UsOnly)
  • KNAUS, Hanns-Joachim [DE]/[DE] (UsOnly)
  • WINDISCH, Hans-Jürgen [DE]/[DE] (UsOnly)
Inventors
  • KIRCHMEIER, Thomas
  • GLÜCK, Michael
  • KNAUS, Hanns-Joachim
  • WINDISCH, Hans-Jürgen
Agents
  • KOHLER SCHMID MOBUS
Priority Data
60/951,39223.07.2007US
Publication Language German (DE)
Filing Language German (DE)
Designated States
Title
(DE) PLASMAVERSORGUNGSEINRICHTUNG UND VERFAHREN ZUM BETRIEB EINER VOLLBRÜCKE EINER PLASMAVERSORGUNGSEINRICHTUNG
(EN) PLASMA SUPPLY DEVICE AND METHOD FOR OPERATION OF A FULL BRIDGE OF A PLASMA SUPPLY DEVICE
(FR) DISPOSITIF D'ALIMENTATION EN PLASMA ET PROCÉDÉ D'UTILISATION D'UN PONT INTÉGRAL D'UN DISPOSITIF D'ALIMENTATION EN PLASMA
Abstract
(DE)
Die Erfindung betrifft eine Plasmaversorgungseinrichtung (10) mit einer an eine Leistungsgleichstromversorgung angeschlossenen Vollbrückenschaltung (11), die zwei Halbbrücken (14, 17) mit jeweils zwei in Serie geschalteten Schaltelementen (15, 16, 18, 19) aufweist, wobei an die Mittelpunkte (M1, M2) der Halbbrücken (14, 17) zwischen den Schaltelementen (15, 16, 18, 19) eine Primärwicklung (20) eines Leistungsübertragers (21) angeschlossen ist. Die Primärwicklung (20) weist eine Anzapfung (25) auf, an die eine wechselstrommäßige Mitte zwischen den Potentialen (12, 13) der Leistungsgleichstromversorgung angeschlossen ist.
(EN)
The invention relates to a plasma supply device (10) having a full-bridge circuit (11) which is connected to a DC power supply and has two half bridges (14, 17), which each have two series-connected switching elements (15, 16, 18, 19) with a primary winding (20) of a power transformer (21) being connected to the centre points (M1, M2) of the half-bridges (14, 17) between the switching elements (15, 16, 18, 19). The primary winding (20) has a tap (25) to which an AC centre between the potentials (12, 13) of the DC power supply is connected.
(FR)
L'invention concerne un dispositif d'alimentation en plasma (10) comportant un circuit de pont intégral (11) connecté à une alimentation en courant continu de puissance, présentant deux demi-ponts (14, 17) respectivement pourvus de deux éléments de commutation (15, 16, 18, 19) montés en série, un enroulement primaire (20) d'un transmetteur de puissance (21) étant connecté aux centres (M1, M2) des demi-ponts (14, 17), entre les éléments de commutation (15, 16, 18, 19). L'enroulement primaire (20) présente une prise (25) à laquelle un point central de courant alternatif, situé entre les potentiels (12, 13) de l'alimentation en courant continu de puissance, est connecté.
Also published as
DE1120080000921
Latest bibliographic data on file with the International Bureau