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1. WO2009011801 - CORROSION-RESISTANT INTERNAL COATING METHOD USING A GERMANIUM-CONTAINING PRECURSOR AND HOLLOW CATHODE TECHNIQUES

Publication Number WO/2009/011801
Publication Date 22.01.2009
International Application No. PCT/US2008/008537
International Filing Date 11.07.2008
IPC
C23C 16/00 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes
CPC
C23C 16/0272
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
02Pretreatment of the material to be coated
0272Deposition of sub-layers, e.g. to promote the adhesion of the main coating
C23C 16/045
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
04Coating on selected surface areas, e.g. using masks
045Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
C23C 16/26
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
22characterised by the deposition of inorganic material, other than metallic material
26Deposition of carbon only
C23C 16/515
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
44characterised by the method of coating
50using electric discharges
515using pulsed discharges
Y10T 117/10
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
117Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
10Apparatus
Y10T 117/1004
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
117Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
10Apparatus
1004with means for measuring, testing, or sensing
Applicants
  • SUB-ONE TECHNOLOGY, INC. [US]/[US] (AllExceptUS)
  • TUDHOPE, Andrew, W. [US]/[US] (UsOnly)
  • CASSERLY, Thomas, B. [US]/[US] (UsOnly)
  • BOINAPALLY, Karthik [IN]/[US] (UsOnly)
  • UPADHYAYA, Deepak [US]/[US] (UsOnly)
  • BOARDMAN, William, J. [US]/[US] (UsOnly)
Inventors
  • TUDHOPE, Andrew, W.
  • CASSERLY, Thomas, B.
  • BOINAPALLY, Karthik
  • UPADHYAYA, Deepak
  • BOARDMAN, William, J.
Agents
  • MCHUGH, Terry
Priority Data
60/959,36113.07.2007US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) CORROSION-RESISTANT INTERNAL COATING METHOD USING A GERMANIUM-CONTAINING PRECURSOR AND HOLLOW CATHODE TECHNIQUES
(FR) PROCÉDÉ DE REVÊTEMENT INTERNE ANTICORROSION FAISANT APPEL À UN PRÉCURSEUR CONTENANT DU GERMANIUM ET À DES TECHNIQUES DE CATHODE CREUSE
Abstract
(EN)
Enhanced corrosion resistance is achieved in a coating by using a germanium-containing precursor (86) and hollow cathode techniques (92) to form a first layer directly on the surface of a workpiece (10 and 110), prior to forming an outer layer, such as a layer of diamond-like carbon (DLC). The use of a germanium or germanium-carbide precursor reduces film stress and enables an increase in the thickness of the subsequently formed DLC. Germanium incorporation also reduces the porosity of the layer. In one embodiment, a cap layer containing germanium is added after the DLC in order to further reduce the susceptibility of the coating to chemical penetration from the top.
(FR)
L'invention porte sur un revêtement aux propriétés anticorrosion améliorées, que l'on obtient en utilisant un précurseur (86) contenant du germanium et des techniques de cathode creuse (92) afin de former une première couche directement sur la surface d'une pièce (10 et 110) avant de former une couche extérieure, telle qu'une couche de carbone de type diamant (DLC). L'utilisation d'un précurseur au germanium ou au carbure de germanium permet de réduire les contraintes s'exerçant sur le film et d'augmenter l'épaisseur du carbone de type diamant formé ultérieurement. L'incorporation de germanium permet également de réduire la porosité de la couche. Dans un mode de réalisation, on ajoute une couche superficielle contenant du germanium après avoir formé le carbone de type diamant afin de réduire davantage la sensibilité du revêtement à la pénétration chimique venant du haut.
Also published as
Latest bibliographic data on file with the International Bureau