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1. WO2009010330 - METHOD OF PRODUCING OXIDE COATINGS

Publication Number WO/2009/010330
Publication Date 22.01.2009
International Application No. PCT/EP2008/056529
International Filing Date 28.05.2008
IPC
C23C 14/08 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06characterised by the coating material
08Oxides
CPC
C23C 14/081
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06characterised by the coating material
08Oxides
081of aluminium, magnesium or beryllium
H01J 37/3467
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
34operating with cathodic sputtering
3464Operating strategies
3467Pulsed operation, e.g. HIPIMS
Applicants
  • SANDVIK INTELLECTUAL PROPERTY AB [SE]/[SE] (AllExceptUS)
  • WALLIN, Erik [SE]/[SE] (UsOnly)
  • HELMERSSON, Ulf [SE]/[SE] (UsOnly)
Inventors
  • WALLIN, Erik
  • HELMERSSON, Ulf
Agents
  • HÄGGLÖF, Henrik
Priority Data
0701435-008.06.2007SE
0701525-820.06.2007SE
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) METHOD OF PRODUCING OXIDE COATINGS
(FR) PROCÉDÉ DE PRODUCTION DE REVÊTEMENTS D'OXYDE
Abstract
(EN)
The present invention relates to a method of producing oxide coatings, whereby operating a HIPIMS discharge on one or more target(s), in an argon and oxygen gas mixture, at peak pulse power higher than 200 Wcm-2, in which the deposition rate is improved and in the need for partial reactive gas pressure feedback systems is eliminated.
(FR)
La présente invention concerne un procédé de production de revêtements d'oxyde consistant à effectuer un dépôt par HIPIMS sur une ou plusieurs cibles, dans un mélange gazeux d'argon et d'oxygène, à une densité de puissance des impulsions de crête supérieure à 200 Wcm-2, caractérisé en ce que la vitesse de dépôt est améliorée et en ce que la nécessité d'avoir des systèmes de rétroaction de la pression du gaz réactif partielle est éliminée.
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