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1. WO2009008517 - CONTROLLER OF PLASMA FORMATION REGION AND PLASMA PROCESSOR

Publication Number WO/2009/008517
Publication Date 15.01.2009
International Application No. PCT/JP2008/062635
International Filing Date 12.07.2008
IPC
H05H 1/24 2006.01
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY- CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
1Generating plasma; Handling plasma
24Generating plasma
H05H 1/00 2006.01
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY- CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
1Generating plasma; Handling plasma
CPC
F02P 23/045
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
02COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
PIGNITION, OTHER THAN COMPRESSION IGNITION, FOR INTERNAL-COMBUSTION ENGINES; TESTING OF IGNITION TIMING IN COMPRESSION-IGNITION ENGINES
23Other ignition
04Other physical ignition means, e.g. using laser rays
045using electromagnetic microwaves
F02P 3/02
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
02COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
PIGNITION, OTHER THAN COMPRESSION IGNITION, FOR INTERNAL-COMBUSTION ENGINES; TESTING OF IGNITION TIMING IN COMPRESSION-IGNITION ENGINES
3Other installations
02having inductive energy storage, e.g. arrangements of induction coils
F02P 9/007
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
02COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
PIGNITION, OTHER THAN COMPRESSION IGNITION, FOR INTERNAL-COMBUSTION ENGINES; TESTING OF IGNITION TIMING IN COMPRESSION-IGNITION ENGINES
9Electric spark ignition control, not otherwise provided for
002Control of spark intensity, intensifying, lengthening, suppression
007by supplementary electrical discharge in the pre-ionised electrode interspace of the sparking plug, e.g. plasma jet ignition
H01J 37/32192
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
32192Microwave generated discharge
H01J 37/32825
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32431Constructional details of the reactor
32798Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
32816Pressure
32825Working under atmospheric pressure or higher
H05H 1/46
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
HPLASMA TECHNIQUE
1Generating plasma; Handling plasma
24Generating plasma
46using applied electromagnetic fields, e.g. high frequency or microwave energy
Applicants
  • イマジニアリング株式会社 IMAGINEERING, Inc. [JP]/[JP] (AllExceptUS)
  • 池田 裕二 IKEDA, Yuji [JP]/[JP] (UsOnly)
Inventors
  • 池田 裕二 IKEDA, Yuji
Agents
  • 山崎 高明 YAMAZAKI, Takaaki
Priority Data
2007-18375112.07.2007JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) CONTROLLER OF PLASMA FORMATION REGION AND PLASMA PROCESSOR
(FR) CONTRÔLEUR D'UNE RÉGION DE FORMATION DE PLASMA ET PROCESSEUR DE PLASMA
(JA) プラズマ形成領域の制御装置及びプラズマ処理装置
Abstract
(EN)
A controller of a plasma formation region capable of easily and inexpensively obtaining large-scale plasma under high pressure. The controller includes a microwave oscillator, an antenna connected with the microwave oscillator, and a control means for controlling positions of the microwave oscillator and the antenna. The control means places the antenna toward the formation region of plasma based on designation of the plasma formation region at each time point, sets a driving sequence of the microwave oscillator based on a designated plasma temperature state, and drives the microwave oscillator according to the driving sequence.
(FR)
L'invention concerne un contrôleur d'une région de formation de plasma permettant d'obtenir facilement et de manière peu coûteuse du plasma à grande échelle sous haute pression. Le contrôleur comprend un oscillateur micro-ondes auquel est raccordé une antenne et un dispositif de commande pour commander les positions de l'oscillateur micro-ondes et de l'antenne. Le dispositif de commande place l'antenne en direction de la région de formation de plasma sur la base de l'indication de cette région à chaque point temporel, établit une séquence d'entraînement de l'oscillateur micro-ondes en fonction de la température du plasma indiquée et entraîne l'oscillateur micro-ondes conformément à la séquence d'entraînement.
(JA)
高圧力下において、大規模なプラズマを、容易、かつ、低コストで得ることができるプラズマの存在領域の制御装置を提供する。 マイクロ波発振器と、マイクロ波発振器に接続されたアンテナと、マイクロ波発振器及びアンテナの位置を制御する制御手段とを備え、制御手段は、各時刻におけるプラズマの形成領域の指定に基づいてプラズマの形成領域に向けてアンテナを配置し、指定されたプラズマの温度状態に基づいてマイクロ波発振器の駆動シーケンスを設定し、この駆動シーケンスにしたがいマイクロ波発振器を駆動する。
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