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1. WO2009006162 - MEMS DEVICES HAVING IMPROVED UNIFORMITY AND METHODS FOR MAKING THEM

Publication Number WO/2009/006162
Publication Date 08.01.2009
International Application No. PCT/US2008/068205
International Filing Date 25.06.2008
IPC
B81B 3/00 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
3Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
CPC
B81B 2201/047
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
2201Specific applications of microelectromechanical systems
04Optical MEMS
047Optical MEMS not provided for in B81B2201/042 - B81B2201/045
B81B 3/0072
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
3Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
0064Constitution or structural means for improving or controlling the physical properties of a device
0067Mechanical properties
0072For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
G02B 26/001
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
001based on interference in an adjustable optical cavity
Applicants
  • QUALCOMM MEMS TECHNOLOGIES, INC. [US]/[US] (AllExceptUS)
  • HEALD, David, L. [US]/[US] (UsOnly)
  • ZHONG, Fan [US]/[US] (UsOnly)
  • FLOYD, Philip, Don [US]/[US] (UsOnly)
Inventors
  • HEALD, David, L.
  • ZHONG, Fan
  • FLOYD, Philip, Don
Agents
  • ABUMERI, Mark, M.
Priority Data
08153313.526.03.2008EP
11/773,35703.07.2007US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) MEMS DEVICES HAVING IMPROVED UNIFORMITY AND METHODS FOR MAKING THEM
(FR) DISPOSITIFS MICROÉLECTROMÉCANIQUES AYANT UNE UNIFORMITÉ AMÉLIORÉE ET LEURS PROCÉDÉS DE FABRICATION
Abstract
(EN)
Disclosed is a microelectromechanical system (MEMS) device and method of manufacturing the same. In one aspect, MEMS such as an interferometric modulator include one or more elongated interior posts and support rails supporting a deformable reflective layer, where the elongated interior posts are entirely within an interferometric cavity and aligned parallel with the support rails. In another aspect, the interferometric modulator includes one or more elongated etch release holes formed in the deformable reflective layer and aligned parallel with channels formed in the deformable reflective layer defining parallel strips of the deformable reflective layer.
(FR)
L'invention porte sur un dispositif de système microélectromécanique (MEMS) et sur un procédé de fabrication de celui-ci. Sous un aspect, un MEMS tel qu'un modulateur interférométrique comprend un ou plusieurs montants intérieurs allongés et des rails de support supportant une couche réfléchissante déformable, les montants intérieurs allongés étant entièrement à l'intérieur d'une cavité interférométrique et alignés parallèles aux rails de support. Sous un autre aspect, le modulateur interférométrique comprend un ou plusieurs trous à libération de réactif de gravure allongés formés dans la couche réfléchissante déformable et alignés parallèle à des canaux formés dans la couche réfléchissante déformable définissant des bandes parallèles de la couche réfléchissante déformable.
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