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1. WO2009004882 - LEVITATION DEVICE AND LEVITATION TRANSPORTATION DEVICE

Publication Number WO/2009/004882
Publication Date 08.01.2009
International Application No. PCT/JP2008/060181
International Filing Date 03.06.2008
IPC
B65G 51/03 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
51Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
02Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
03over a flat surface or in troughs
B65G 49/06 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
49Conveying systems characterised by their application for specified purposes not otherwise provided for
05for fragile or damageable materials or articles
06for fragile sheets, e.g. glass
H01L 21/677 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677for conveying, e.g. between different work stations
CPC
B65G 21/20
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
21Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyors
20Means incorporated in, or attached to, framework or housings for guiding load-carriers, traction elements or loads supported on moving surfaces
B65G 2249/02
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
2249Aspects relating to conveying systems for the manufacture of fragile sheets
02Controlled or contamination-free environments or clean space conditions
B65G 37/00
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
37Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
B65G 49/065
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
49Conveying systems characterised by their application for specified purposes not otherwise provided for
05for fragile or damageable materials or articles
06for fragile sheets, e.g. glass
063Transporting devices for sheet glass
064in a horizontal position
065supported partially or completely on fluid cushions, e.g. a gas cushion
H01L 21/67784
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67784using air tracks
Applicants
  • 株式会社IHI IHI Corporation [JP]/[JP] (AllExceptUS)
  • 水野 智夫 MIZUNO, Tomoo (UsOnly)
  • 田中 刈入 TANAKA, Kai (UsOnly)
Inventors
  • 水野 智夫 MIZUNO, Tomoo
  • 田中 刈入 TANAKA, Kai
Agents
  • 三好 秀和 MIYOSHI, Hidekazu
Priority Data
2007-17342329.06.2007JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) LEVITATION DEVICE AND LEVITATION TRANSPORTATION DEVICE
(FR) DISPOSITIF DE LÉVITATION ET DISPOSITIF DE TRANSPORT PAR LÉVITATION
(JA) 浮上装置及び浮上搬送装置
Abstract
(EN)
A levitation transportation device for transporting an object with a lower surface while levitating the object by fluid. The levitation transportation device has a levitation device, a fluid supply device, and a transportation device. The levitation device has a plate and a frame member. The plate has a base by which a chamber through which the fluid passes is defined, an upper surface, and one or more nozzles communicating with the chamber and opened in the upper surface, and the plate is placed to cover the chamber. The frame member has an inner surface converging toward the upper end of the frame member and is placed above the plate such that the inner surface and the upper surface of the plate surround a cavity communicating with the nozzles and open upward. The fluid supply device supplies the fluid to the chamber after pressurizing it. The transportation device transports the object.
(FR)
La présente invention concerne un dispositif de transport par lévitation destiné à transporter un objet avec une surface inférieure tout en lévitant l'objet par un fluide. Le dispositif de transport par lévitation présente un dispositif de lévitation, un dispositif d'alimentation en fluide, et un dispositif de transport. Le dispositif de lévitation présente une plaque et un élément formant cadre. La plaque présente une base qui définit une chambre à travers laquelle passe le fluide, une surface supérieure, et une ou plusieurs buses communiquant avec la chambre et ouvertes dans la surface supérieure, et la plaque est disposée de façon à recouvrir la chambre. L'élément formant cadre présente une surface interne convergeant vers l'extrémité supérieure de l'élément formant cadre et est placé au-dessus de la plaque de telle sorte que la surface interne et la surface supérieure de la plaque entourent une cavité communiquant avec les buses et ouverte vers le haut. Le dispositif d'alimentation en fluide alimente la chambre en fluide après avoir sa mise sous pression. Le dispositif de transport transporte l'objet.
(JA)
 下面を有する対象物を流体により浮上させて搬送するための浮上搬送装置が開示されている。前記浮上搬送装置は、前記流体が通過するチャンバを区画する基部と、上面と、前記チャンバと連通して前記上面に開口した一以上のノズルとを有し、前記チャンバを覆うように配置されたプレートと、上端に向かって狭まる内面を有し、前記内面と前記プレートの前記上面とが、前記ノズルに連通して上方向に開放された空虚な空間を囲むべく、前記プレートの上方に配置された枠部材と、を備えた浮上装置と、前記流体を与圧して前記チャンバへ供給する流体供給装置と、前記対象物を搬送するための搬送装置と、を備える。
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