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1. (WO2008103617) METHOD AND INSTRUMENT FOR CHEMICAL DEFECT CHARACTERIZATION IN HIGH VACUUM
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2008/103617    International Application No.:    PCT/US2008/054155
Publication Date: 28.08.2008 International Filing Date: 15.02.2008
IPC:
G01B 5/28 (2006.01)
Applicants: KLA-TENCOR CORPORATION [US/US]; 160 Rio Robles, San Jose, CA 95134 (US) (For All Designated States Except US).
NASSER-GHODSI, Mehran [US/US]; (US) (For US Only).
YU, Ming Lun [US/US]; (US) (For US Only).
FRIEDMAN, Stuart [US/US]; (US) (For US Only).
TOTH, Gabor [HU/US]; (US) (For US Only)
Inventors: NASSER-GHODSI, Mehran; (US).
YU, Ming Lun; (US).
FRIEDMAN, Stuart; (US).
TOTH, Gabor; (US)
Agent: ISENBERG, Joshua, D.; JDI PATENT, 809 Corporate Way, Fremont, California 94539 (US)
Priority Data:
60/890,512 19.02.2007 US
Title (EN) METHOD AND INSTRUMENT FOR CHEMICAL DEFECT CHARACTERIZATION IN HIGH VACUUM
(FR) PROCÉDÉ ET INSTRUMENT DE CARACTÉRISATION D'UN DÉFAUT CHIMIQUE SOUS VIDE POUSSÉ
Abstract: front page image
(EN)A method and the instrument for characterization of the defects on a surface with Auger electron spectroscopy in a high vacuum environment are disclosed. Defects on the surface of a sample may be characterized with Auger electron spectroscopy in a high vacuum environment at a pressure of about 10-7 Torr to 10-6 Torr.
(FR)La présente invention concerne un procédé et l'instrument pour la caractérisation des défauts sur une surface par spectroscopie électronique d'Auger dans un environnement sous vide poussé. Les défauts sur la surface d'un échantillon peuvent être caractérisés par spectroscopie électronique d'Auger dans un environnement sous vide poussé à une pression d'environ 10-7 Torr à 10-6 Torr.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)