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1. (WO2008099896) INDUCTION COIL, PLASMA GENERATING APPARATUS AND PLASMA GENERATING METHOD
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2008/099896    International Application No.:    PCT/JP2008/052461
Publication Date: 21.08.2008 International Filing Date: 14.02.2008
IPC:
H05H 1/46 (2006.01), C23C 16/44 (2006.01), C23C 16/507 (2006.01), H01L 21/3065 (2006.01)
Applicants: FOI Corporation [JP/JP]; 1-1-10 Oyama, Sagamihara-shi, Kanagawa 2291105 (JP) (For All Designated States Except US).
VINOGRADOV, Georgy [RU/JP]; (JP) (For US Only).
MENAGARISHVILI, Vladimir [RU/JP]; (JP) (For US Only).
SHIMAMURA, Tetsuhiko [JP/JP]; (JP) (For US Only).
NAKAMURA, Masayuki [JP/JP]; (JP) (For US Only)
Inventors: VINOGRADOV, Georgy; (JP).
MENAGARISHVILI, Vladimir; (JP).
SHIMAMURA, Tetsuhiko; (JP).
NAKAMURA, Masayuki; (JP)
Agent: YOKOI, Toshiyuki; YOKOI NAIGAIKOKU TOKKYO JIMUSHO 27, Kurumada-cho 1-chome, Showa-ku Nagoya-shi Aichi 4660001 (JP)
Priority Data:
2007-037036 16.02.2007 JP
Title (EN) INDUCTION COIL, PLASMA GENERATING APPARATUS AND PLASMA GENERATING METHOD
(FR) BOBINE D'INDUCTION, APPAREIL DE PRODUCTION DE PLASMA ET PROCÉDÉ DE PRODUCTION DE PLASMA
(JA) 誘導コイル、プラズマ発生装置およびプラズマ発生方法
Abstract: front page image
(EN)It has been difficult to generate highly uniform plasma. At the time of generating plasma in a prescribed space, an induction coil having a symmetric shape on a reference surface between two terminals is provided, the prescribed space is supplied with a gas for generating plasma, and the induction coil is supplied with high frequency power to generate plasma in the prescribed space. The reference surface is a surface that passes through between the two terminals and an axis center in the longitudinal direction of the coil. As a result, extremely high uniform plasma is generated.
(FR)Il s'est révélé difficile de produire un plasma hautement uniforme. Lors d'une production de plasma dans un espace recommandé, il est ménagé une bobine d'induction de forme symétrique sur une surface de référence entre deux bornes, l'espace recommandé est alimenté avec un gaz de production de plasma et la bobine d'induction est alimentée avec un courant à haute fréquence de façon à produire du plasma dans l'espace recommandé. La surface de référence est une surface qui passe entre les deux bornes et un centre axial dans la direction longitudinale de la bobine. De ce fait, il est produit un plasma extrêmement uniforme.
(JA) 均一性の高いプラズマを発生させることが困難であった。  所定の空間中にプラズマを発生させる場合に、2つの端子間の基準面で対称な形状である誘導コイルを備え、上記所定の空間にプラズマ発生用のガスを供給し、上記誘導コイルに高周波電力を供給することにより上記所定の空間にプラズマを発生させる構成とした。上記基準面は、上記二つの端子間とコイルの長手方向の軸芯とを通過する面である。  その結果、極めて均一性の高いプラズマを発生させることができる。
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)