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Pub. No.:    WO/2008/096580    International Application No.:    PCT/JP2008/050514
Publication Date: 14.08.2008 International Filing Date: 17.01.2008
G02B 3/14 (2006.01), B81B 3/00 (2006.01), G02B 6/13 (2006.01), G02B 26/00 (2006.01), G02B 26/08 (2006.01), G02F 2/00 (2006.01)
Applicants: The University of Tokyo [JP/JP]; 3-1, Hongo 7-chome, Bunkyo-ku, Tokyo 1138654 (JP) (For All Designated States Except US).
SHIMOYAMA, Isao [JP/JP]; (JP) (For US Only).
MATSUMOTO, Kiyoshi [JP/JP]; (JP) (For US Only).
IWASE, Eiji [JP/JP]; (JP) (For US Only).
NGUYEN, Binh-Khiem [JP/JP]; (JP) (For US Only)
Inventors: SHIMOYAMA, Isao; (JP).
MATSUMOTO, Kiyoshi; (JP).
IWASE, Eiji; (JP).
NGUYEN, Binh-Khiem; (JP)
Agent: USHIKI, Mamoru; 3rd Fl., Yusei Fukushi Kotohira Bldg. 14-1, Toranomon 1-chome Minato-ku, Tokyo 1050001 (JP)
Priority Data:
2007-007782 17.01.2007 JP
2007-149686 05.06.2007 JP
(JA) マイクロデバイス及びその製造方法
Abstract: front page image
(EN)Disclosed is a highly reliable small-sized thin microdevice having a simple structure, which is improved in productivity. Also disclosed is a method for manufacturing such a microdevice. Specifically, by forming a silicon oil convex portion (6) using a silicon oil which hardly evaporates even in a high vacuum, it becomes possible to form a protective film (10) on the liquid surface of the silicon oil convex portion (6), which is in a liquid state, by a high-vacuum CVD method. Because of such a simple structure, a microdevice can be reduced in size and thickness, while being improved in productivity since a conventional complicated assembling process wherein a separate sheet member is bonded can be omitted. Since the protective film (10) is used, deformation of the silicon oil convex portion (6) due to an external impact or gravity can be prevented, and thus there can be provided a variable focus liquid lens (1) having a higher reliability.
(FR)Microdispositif mince de petite taille hautement fiable, ayant une structure simple, dont la productivité est améliorée. Également, procédé de fabrication correspondant. Spécifiquement, la formation d'une partie convexe en huile de silicone (6), de faible évaporation même sous vide élevé, permet d'établir un film de protection (10) sur la surface liquide de cette partie (6), qui est à l'état liquide, selon un procédé CVD sous vide élevé. Cette structure simple permet de réduire la taille et l'épaisseur d'un microdispositif, tout en améliorant la productivité, car on n'utilise plus le procédé classique d'assemblage complexe qui fait appel à la liaison d'une feuille séparée. L'utilisation d'un tel film de protection (10) permet d'éviter la déformation de ladite partie convexe (10) due à un impact externe ou à la gravité, et on dispose ainsi d'une lentille liquide à focalisation variable (1) de fiabilité supérieure.
(JA)簡易な構成で小型化、薄型化を図ることができ、かつ生産性を向上させながら信頼性の高いマイクロデバイス及びその製造方法を提供することを目的とする。 高真空の中でも蒸発量が少ないシリコンオイルによってシリコンオイル膨出部6を形成したことで、高真空CVD法を用いて、液体状のシリコンオイル膨出部6の液表面に保護膜10 を積層形成できるようにした。かくして簡易な構成で小型化、薄型化を図ることができ、また従来のように別途シート部材を貼着する煩雑な組立工程を省くことができるので、その分生産性を向上さ せることができる。さらに、保護膜10 を用いていることから、衝撃や重力などによってシリコンオイル膨出部6が変形してしまうことを防止でき、一段と信頼性の高い可変焦点液体レンズ1を提供できる。
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)