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1. WO2008044484 - PROFILE VIBRATOR, PIEZOELECTRIC OSCILLATOR USING SAME, AND CIRCUIT MODULE

Publication Number WO/2008/044484
Publication Date 17.04.2008
International Application No. PCT/JP2007/068915
International Filing Date 20.09.2007
IPC
H03H 9/19 2006.01
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
15Constructional features of resonators consisting of piezo-electric or electrostrictive material
17having a single resonator
19consisting of quartz
H01L 41/09 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08Piezo-electric or electrostrictive elements
09with electrical input and mechanical output
H01L 41/18 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
16Selection of materials
18for piezo-electric or electrostrictive elements
CPC
H03H 9/02023
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
02Details
02007of bulk acoustic wave devices
02015Characteristics of piezoelectric layers, e.g. cutting angles
02023consisting of quartz
H03H 9/02157
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
02Details
02007of bulk acoustic wave devices
02157Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
H03H 9/0595
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
02Details
05Holders; Supports
0595the holder support and resonator being formed in one body
H03H 9/132
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
02Details
125Driving means, e.g. electrodes, coils
13for networks consisting of piezo-electric or electrostrictive materials
132characterized by a particular shape
H03H 9/19
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
15Constructional features of resonators consisting of piezo-electric or electrostrictive material
17having a single resonator
19consisting of quartz
Applicants
  • エプソントヨコム株式会社 EPSON TOYOCOM CORPORATION [JP]/[JP] (AllExceptUS)
  • 山田明法 YAMADA, Akinori [JP]/[JP] (UsOnly)
  • 小野澤康秀 ONOZAWA, Yasuhide [JP]/[JP] (UsOnly)
Inventors
  • 山田明法 YAMADA, Akinori
  • 小野澤康秀 ONOZAWA, Yasuhide
Agents
  • 上柳雅誉 KAMIYANAGI, Masataka
Priority Data
2006-25385720.09.2006JP
2007-04182322.02.2007JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) PROFILE VIBRATOR, PIEZOELECTRIC OSCILLATOR USING SAME, AND CIRCUIT MODULE
(FR) ÉLÉMENT VIBRANT PROFILÉ, OSCILLATEUR PIÉZOÉLECTRIQUE DANS LEQUEL EST UTILISÉ CET ÉLÉMENT VIBRANT PROFILÉ ET MODULE DE CIRCUIT
(JA) 輪郭振動子並びにそれを用いた圧電発振器及び回路モジュール
Abstract
(EN)
A profile vibrator comprises a vibratory body made of a crystal substrate whose cut angle is YXIt&phis;/ϑ of the IRE standards, having a rectangular shape when viewed from above, and exciting electrodes formed on both sides of the vibratory body and each having a rectangular outline shape. The cut angle ϑ is in the range from 40° to 50°. According to the length L of one side of the rectangle of the shape of the vibratory body when viewed from above, the thickness t of the vibratory body, the film thickness H of each exciting electrode, and the length Le of one side of the rectangle of the outline shape of each exciting electrode, the cut angle &phis; is appropriately determined. Thus, a profile vibrator having an improved temperature characteristic is provided.
(FR)
L'invention concerne un élément vibrant profilé comprenant un corps d'élément vibrant constitué d'un substrat en cristal dont l'angle de coupe correspond à YXIt&phis;/ϑ des normes IRE, possédant une forme rectangulaire vu d'en haut et comportant des électrodes d'excitation formées sur les deux côtés du corps de l'élément vibrant et possédant une forme de tracé rectangulaire. L'angle de coupe ϑ est compris entre 40° et 50°. À partir de la longueur L d'un côté du rectangle de la forme du corps de l'élément vibrant vu d'en haut, de l'épaisseur t du corps de l'élément vibrant, de l'épaisseur H de chaque électrode d'excitation et de la longueur Le d'un côté du rectangle de la forme de tracé rectangulaire de chaque électrode d'excitation, on peut déterminer l'angle de coupe &phis; de façon appropriée. L'invention concerne, par conséquent, un élément vibrant profilé possédant une caractéristique thermique améliorée.
(JA)
カット角がIRE標準のYXltφ/θで表される水晶基板からなる、平面形状が四角形の振動体と、前記振動体の表裏両面に形成され、外郭形状が四角形の励振電極とを備え、前記カット角θが40度以上50度以下の範囲であり、前記振動体の平面形状をなす前記四角形の1辺の長さL、前記振動体の厚さt、前記励振電極の膜厚H、前記励振電極の外郭形状をなす前記四角形の1辺の長さLe、によりカット角φを適切に設定して、温度特性の改善された輪郭振動子を得る。
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