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1. WO2007150066 - FLUIDIC SELF-ASSEMBLY FOR SYSTEM INTEGRATION

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[ EN ]

CLAIMS
The embodiments of the invention in which an exclusive property or privilege is claimed are defined as follows:

1. A method for assembling a plurality of microcomponents onto a template, the method comprising the steps of:
fabricating a plurality of microcomponents of more than one type, wherein each type of microcomponent has a distinct shape, and further wherein each of the microcomponents have metal pads;
fabricating a template having a plurality of recessed binding sites wherein each binding site is shaped to correspond to one of the types of microcomponents, the template having an interconnect network interconnecting the plurality of binding sites, and wherein each of the binding sites includes an alloy having a low melting temperature;
immersing the template in a heated liquid that is hotter than the alloy melting temperature;
placing at least some of the plurality of microcomponents into the heated liquid such that at least some of the microcomponents are received into the plurality of recessed binding sites with their metal pads engaging the alloy; and
cooling the alloy thereby connecting the received microcomponents to the interconnect network.

2. The method of Claim 1 , wherein the plurality of microcomponents include transistors.

3. The method of Claim 2, wherein the transistors are fabricated with silicon nitride used both as a diffusion mask and as a gate dielectric layer.

4. The method of Claim 1, wherein the distinct shapes of the microcomponents include one or more shapes from the group comprising circular, square, rectangular, triangular, and cruciform.

5. The method of Claim 1, wherein the metal pads are formed on only one side of the microcomponents.

6. The method of Claim 1, wherein the microcomponents are formed on a silicon-on-insulator wafer and released from the wafer using an acid bath to produce freestanding microcomponents.

7. The method of Claim 1, wherein the template includes a substrate formed from a material selected from the group polyester and polyethylene terephthalate.

8. The method of Claim 7, wherein binding sites are formed on the substrate with an epoxy-based clear negative photoresist.

9. The method of Claim 7, wherein the alloy melting temperature is less than about 8O0C.

10. The method of Claim 7, wherein the alloy is applied to the template using a dip-coating technique.

11. The method of Claim 1, wherein the heated liquid comprises a liquid selected from the group ethylene glycol and glycerol.

12. The method of Claim 11, wherein the liquid is heated to about 7O0C.

13. The method of Claim 1, farther comprising the steps of cleaning the microcomponents with a short piranha etch and rinsing the microcomponents with de-ionized water prior to placing the microcomponents in the heated liquid.

14. The method of Claim 1 , wherein the step of immersing the template in the heated liquid includes orienting the template at an angle of approximately 20 to 60 degrees with respect to horizontal.

15. The method of Claim 1, further comprising the step of fiuid-dynamically urging the microcomponents to flow past the binding sites.

16. The method of Claim 15, further comprising the step of recirculating a portion of the microcomponents after they have flowed past the binding sites.

17. The method of Claim 1 , further comprising the step of agitating the heated liquid.

18. The method of Claim 1 , further comprising the step of lowering the heated liquid temperature to solidify the alloy.

19. The method of Claim 1, wherein the step of placing at least some of the plurality of microcomponents into the heated liquid is accomplished in several steps wherein a first type of the plurality of microcomponents is first placed into the heated liquid and then a second type of the plurality of microcomponents is subsequently placed into the heated liquid.

20. The method of Claim 1, wherein the plurality of microcomponents comprise one or more of electronic microcomponents, optoelectronic microcomponents, and micromechanical microcomponents.

21. A method of assembling a plurality of microcomponents onto a template comprising the steps of:
fabricating a plurality of first microcomponents having a first shape and a metal pad interconnect;
fabricating a template with a plurality of recessed binding sites shaped to receive the first microcomponents, the binding sites being electrically connected with an interconnect network, and further comprising a low melting temperature alloy;
immersing the template in a liquid;
placing the first microcomponents into the liquid such that at least some of the first microcomponents are received into at least some of the recessed binding sites such that the received microcomponent metal pad interconnects engage the low melting temperature alloy;
heating the liquid to a temperature greater than the melting temperature of the low melting temperature alloy; and
cooling the template such that the low melting temperature alloy solidifies.

22. The method of Claim 21, wherein the step of heating the liquid occurs after the first microcomponents have been received into the recessed binding sites.

23. The method of Claim 21, wherein the distinct shapes of the microcomponents include one or more shapes from the group comprising circular, square, rectangular, triangular, and cruciform.

24. The method of Claim 21, wherein the metal pad interconnects are formed on only one side of the first microcomponents.

25. The method of Claim 21 , further comprising the steps of:
fabricating a plurality of second microcomponents having a second shape and a metal pad interconnect;
fabricating the template to also include a plurality of recessed binding sites shaped to receive the second microcomponents, the binding sites being electrically connected with an interconnect network, and further comprising a low melting temperature alloy; and
placing the second microcomponents into the liquid such that at least some of the second microcomponents are received into at least some of the recessed binding sites such that the received second microcomponent metal pad interconnects engage the low melting temperature alloy.

26. The method of Claim 21, wherein the template includes a substrate formed from one of polyester and polyethylene terephthalate, and an epoxy-based clear negative photoresist.

27. The method of Claim 21, wherein the heated liquid is selected from the group ethylene glycol and glycerol.

28. The method of Claim 27, wherein the ethylene liquid is heated to about 7O0C.

29. The method of Claim 21, further comprising the steps of cleaning the microcomponents with a short piranha etch and rinsing the microcomponents with de-ionized water prior to placing the microcomponents in the liquid.

30. The method of Claim 21, further comprising the step of recirculating a portion of the first microcomponents.

31. The method of Claim 21, further comprising the step of agitating the heated liquid.