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1. WO2007148968 - LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND RADIATION COLLECTOR

Publication Number WO/2007/148968
Publication Date 27.12.2007
International Application No. PCT/NL2007/050295
International Filing Date 19.06.2007
IPC
G03F 7/20 2006.01
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20Exposure; Apparatus therefor
CPC
F24S 10/95
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
24HEATING; RANGES; VENTILATING
SSOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
10Solar heat collectors using working fluids
90using internal thermosiphonic circulation
95having evaporator sections and condenser sections, e.g. heat pipes
F24S 23/70
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
24HEATING; RANGES; VENTILATING
SSOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
23Arrangements for concentrating solar-rays for solar heat collectors
70with reflectors
F24S 40/50
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
24HEATING; RANGES; VENTILATING
SSOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
40Safety or protection arrangements of solar heat collectors; Preventing malfunction of solar heat collectors
50Preventing overheating or overpressure
G02B 7/1815
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
7Mountings, adjusting means, or light-tight connections, for optical elements
18for prisms; for mirrors
181with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
1815with cooling or heating systems
G03F 7/70175
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
70Exposure apparatus for microlithography
70058Mask illumination systems
7015Details of optical elements
70175Lamphouse reflector arrangements, i.e. collecting light from solid angle upstream of the light source
G03F 7/70891
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
70Exposure apparatus for microlithography
708Construction of apparatus, e.g. environment, hygiene aspects or materials
70858Environment aspects, e.g. pressure of beam-path gas, temperature
70883of optical system
70891Temperature
Applicants
  • ASML NETHERLANDS B.V. [NL]/[NL] (AllExceptUS)
  • BOX, Wilhelmus, Josephus [NL]/[BE]
  • VOORMA, Harm-Jan [NL]/[NL]
  • FRIJNS, Olav, Waldemar, Vladimir [NL]/[NL]
  • LIMPENS, Maurice, Piërre, Marie, Arthur [NL]/[NL]
Inventors
  • BOX, Wilhelmus, Josephus
  • VOORMA, Harm-Jan
  • FRIJNS, Olav, Waldemar, Vladimir
  • LIMPENS, Maurice, Piërre, Marie, Arthur
Agents
  • VAN LOON, C.J.J.
Priority Data
11/455,94320.06.2006US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND RADIATION COLLECTOR
(FR) APPAREIL LITHOGRAPHIQUE, PROCÉDÉ DE FABRICATION DE DISPOSITIF ET COLLECTEUR DE RAYONNEMENT
Abstract
(EN)
A collector is disclosed that is constructed to receive radiation from a radiation source and to transmit radiation to an illumination system, the collector comprising a reflective element (11) which is internally provided with a fluid channel (20).
(FR)
L'invention concerne un collecteur construit pour recevoir un rayonnement provenant d'une source de rayonnement et pour transmettre un rayonnement à un système d'éclairage, le collecteur comportant un élément réfléchissant doté intérieurement d'un canal de fluide.
Latest bibliographic data on file with the International Bureau