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1. WO2007148890 - METHOD FOR MANUFACTURING ELECTRICAL TESTING APPARATUS

Publication Number WO/2007/148890
Publication Date 27.12.2007
International Application No. PCT/KR2007/002873
International Filing Date 14.06.2007
IPC
H01L 21/66 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
66Testing or measuring during manufacture or treatment
CPC
G01R 1/06716
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
02General constructional details
06Measuring leads; Measuring probes
067Measuring probes
06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
06716Elastic
G01R 1/06733
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
02General constructional details
06Measuring leads; Measuring probes
067Measuring probes
06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
06733Geometry aspects
G01R 3/00
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
3Apparatus or processes specially adapted for the manufacture ; or maintenance; of measuring instruments ; , e.g. of probe tips
Applicants
  • CONEM CO, . LTD. [KR]/[KR] (AllExceptUS)
  • SON, Jun Hyuk [KR]/[KR] (UsOnly)
Inventors
  • SON, Jun Hyuk
Agents
  • AJU INTERNATIONAL LAW & PATENT GROUP
Priority Data
10-2006-005512619.06.2006KR
Publication Language English (EN)
Filing Language Korean (KO)
Designated States
Title
(EN) METHOD FOR MANUFACTURING ELECTRICAL TESTING APPARATUS
(FR) PROCÉDÉ DE FABRICATION D'UN APPAREIL DE TEST ÉLECTRIQUE
Abstract
(EN)
A method for manufacturing an electrical testing apparatus comprises coating a first photoresist layer on a probe reinforcing substrate with signal lines which pass through the substrate, forming a pattern by exposing and developing the first photoresist layer, performing a thermal flow process on the first photoresist pattern to form support molds having inclined side surfaces in a cone or truncated cone, forming a seed layer, forming probe beams using a probe beam mold having a first opening portion extended to peaks of the support molds, sequentially removing the probe beam mold and the support molds, forming a protective layer to fixedly support the probe beams, forming a probe tip mold having a second opening portion, and forming probe tips.
(FR)
Le procédé selon l'invention servant à fabriquer un appareil de test électrique consiste à appliquer une première couche photorésistante sur un substrat de renfort de sonde avec des lignes de signal qui traversent le substrat, à réaliser un motif en exposant et développant la première couche photorésistante, à réaliser un traitement par écoulement thermique sur le premier motif photorésistant pour constituer des moules de support comportant des surfaces latérales inclinées en cône ou en cône tronqué, à réaliser une couche de germe, à constituer des faisceaux de sonde au moyen d'un moule de faisceaux de sonde comportant une première partie d'ouverture s'étendant vers les pics des moules de support, à retirer séquentiellement le moule de faisceaux de sonde et les moules de support, à appliquer une couche protectrice pour supporter de manière fixe les faisceaux de sonde, à réaliser un moule de pointe de sonde comportant une seconde partie d'ouverture, et à constituer les pointes des sondes.
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