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1. WO2007148375 - METHOD FOR CALIBRATING ELECTRONIC COMPONENT TESTING APPARATUS

Publication Number WO/2007/148375
Publication Date 27.12.2007
International Application No. PCT/JP2006/312255
International Filing Date 19.06.2006
IPC
G01R 31/26 2006.01
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
31Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
26Testing of individual semiconductor devices
CPC
G01R 31/2891
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
31Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
28Testing of electronic circuits, e.g. by signal tracer
2851Testing of integrated circuits [IC]
2886Features relating to contacting the IC under test, e.g. probe heads; chucks
2891related to sensing or controlling of force, position, temperature
G01R 35/005
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
35Testing or calibrating of apparatus covered by the preceding groups
005Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references
Applicants
  • 株式会社アドバンテスト ADVANTEST Corporation [JP]/[JP] (AllExceptUS)
  • 菊池 有朋 KIKUCHI, Aritomo [JP]/[JP] (UsOnly)
  • 中村 浩人 NAKAMURA, Hiroto [JP]/[JP] (UsOnly)
Inventors
  • 菊池 有朋 KIKUCHI, Aritomo
  • 中村 浩人 NAKAMURA, Hiroto
Agents
  • 西出 眞吾 NISHIDE, Shingo
Priority Data
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) METHOD FOR CALIBRATING ELECTRONIC COMPONENT TESTING APPARATUS
(FR) PROCÉDÉ D'ÉTALONNAGE D'APPAREIL DE TEST DE COMPOSANTS ÉLECTRONIQUES
(JA) 電子部品試験装置のキャリブレーション方法
Abstract
(EN)
A deviation quantity of a socket guide (73) from a socket (71) is calculated from the relative position of a socket camera (414) to the socket guide (73) and the relative position of the socket camera (414) to the socket (71). The relative position of a device camera (434) to the socket (71) is calculated by adding the deviation quantity to the relative position of the device camera (434) to the socket guide (73).
(FR)
Selon l'invention, une grandeur d'écart d'un guide de support (73) par rapport à un support (71) est calculée à partir de la position relative d'une caméra à support (414) par rapport au guide de support (73) et de la position relative de la caméra à support (414) par rapport au support (71). La position relative d'une caméra de dispositif (434) par rapport au support (71) est calculée par ajout de la grandeur d'écart par rapport à la position relative de la caméra de dispositif (434) par rapport au guide de support (73).
(JA)
ソケットガイド(73)に対するソケットカメラ(414)の相対位置と、ソケット(71)に対するソケットカメラ(414)の相対位置とから、ソケット(71)に対するソケットガイド(73)のズレ量を算出し、ソケットガイド(73)に対するデバイスカメラ(434)の相対位置にこのズレ量を加味することにより、ソケット(71)に対するデバイスカメラ(434)の相対位置を算出する。
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