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1. WO2007146643 - MULTI-LEVEL LOAD LOCK CHAMBER, TRANSFER CHAMBER, AND ROBOT SUITABLE FOR INTERFACING WITH SAME

International Application Status
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28.11.2020International Application Status ReportHTML, PDF, XMLPDF, XML
Published International Application
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23.10.2008Later publication of international search report( (A3 43/2008))PDF (3p.)PDF (3p.), ZIP(XML + TIFFs)
21.12.2007Initial Publication without ISR( (A2 51/2007))PDF (29p.)PDF (29p.), ZIP(XML + TIFFs)
Search and Examination-Related Documents
DateTitleViewDownload
16.12.2008(IB/373) International Preliminary Report on Patentability Chapter IPDF (4p.)PDF (4p.), ZIP(XML + TIFFs)
15.12.2008(ISA/237) Written Opinion of the International Searching AuthorityPDF (3p.)PDF (3p.), ZIP(XML + TIFFs)
Related Documents on file at the International Bureau
DateTitleViewDownload
21.12.2007Priority DocumentPDF (36p.)PDF (36p.), ZIP(XML + TIFFs)
21.12.2007(RO/101) Request formPDF (5p.)
21.12.2007(IB/304) Notification Concerning Submission or Transmittal of Priority DocumentPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)