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1. WO2007146643 - MULTI-LEVEL LOAD LOCK CHAMBER, TRANSFER CHAMBER, AND ROBOT SUITABLE FOR INTERFACING WITH SAME

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[ EN ]

We Claim:

1. A load lock chamber, comprising:
a unitary chamber body;
a first chamber and a second chamber formed in the chamber body in a laterally spaced relation;
a third chamber and a fourth chamber formed in the chamber body in a laterally spaced relation and at an elevation below the first and second chambers, the first, second, third and fourth chambers environmentally isolated from each other; and
a substrate support respectively located in each chamber.

2. The chamber of claim 1 , further comprising:
a transfer chamber coupled to the lock body, wherein the transfer chamber comprises a transfer body having a central cavity; and
a robotic assembly disposed within the central cavity.

3. The chamber of claim 1 or claim 2, further comprising:
an upper slit valve door selectively sealing the first and second chambers; and
a lower slit valve door selectively sealing the third and fourth chambers.

4. The chamber of claim 3, further comprising:
an actuator coupled to the upper slit valve door, wherein the actuator moves the upper slit valve door between a lowered closed position and a raised open position; and
a second actuator coupled to the lower slit valve door, wherein the second actuator moves the lower slit valve door between a raised closed position and a lowered open position.

5. The chamber of claim 1 or claim 2, wherein the substrate support further comprises: a heater element.

6. The chamber of claim 1 or claim 2 further comprising:
a first lid coupled to the chamber body and selectively sealing the first chamber; and
a second lid coupled to the chamber body and selectively sealing the second chamber.

7. The chamber of claim 6, further comprising:
a third lid coupled to the chamber body and selectively sealing the third chamber; and
a fourth lid coupled to the chamber body and selectively sealing the fourth chamber.

8. The chamber of claim 7, wherein the third and fourth lids pivot on a hinge to access the third and fourth chambers from the bottom.

9. The chamber of claim 1 or claim 2, further comprising:
a plurality of lift pins disposed in the third and fourth chambers, wherein the lift pins are movable between a lowered position and a raised position; and
a substrate lift hoop disposed in the first and second chambers; and wherein the substrate lift hoop in the first and second chambers are movable between a lowered position and a raised position.

10. The apparatus of claim 2, wherein the transfer chamber further comprises:
a load lock chamber interface having two openings formed through the transfer body to the central cavity; and
two pairs of slit valve doors coupled to the body, wherein each pair of slit valve doors are disposed in a respective opening of the load lock chamber interface.

11. A transfer chamber, comprising: a body having a central cavity and a load lock chamber interface, wherein the interface comprises two openings formed through the body to the central cavity;
two pairs of slit valve doors coupled with the body, wherein each pair of slit valve doors are disposed in a respective opening of the load lock chamber interface; and
a robotic assembly disposed within the central cavity.

12. A robotic assembly, comprising:
at least one arm, wherein the at least one arm comprises two substrate receiving extensions, and wherein each substrate receiving extension is capable of receiving one substrate; and
at least one substrate receiving blade coupled with each arm, wherein the blade is configured to receive a substrate such that the substrate will lie flat against the blade without the blade wrapping around the substrate.

13. The assembly of claim 12, wherein the robotic assembly comprises two arms.

14. The assembly of claim 13, wherein the two arms lie in separate planes and are each movement independent of the other arm.

15. A method of processing a substrate, comprising:
positioning two substrates within a load lock chamber body, wherein the substrates are positioned within first and second chambers that are within the load lock chamber body, wherein the first and second chambers lie in a laterally spaced relation, and wherein the load lock chamber body is coupled with an integrated processing tool;
removing the substrates from the load lock chamber body and positioning the substrates in the integrated processing tool;
processing the substrates; and
re-positioning the substrates within the load lock chamber body, wherein the substrates are positioned within third and fourth chambers that are within the load lock chamber body, wherein the third and fourth chambers lie in a laterally spaced relation and at an elevation above the first and second chambers, and wherein the first, second, third, and fourth chambers are environmentally isolated from each other.

16. The method of claim 15, wherein the positioning the substrates within the first and second chambers comprises:
opening a factory interface door to access the first and second chambers, wherein a common door is coupled with the first and second chambers, and wherein the factory interface door is located on a first side of the load lock chamber body.

17. The method of claim 16, wherein the removing the substrates comprises:
opening a transfer chamber door for the first and second chambers, wherein each chamber has a separate transfer chamber door, and wherein the transfer chamber doors are located on a side of the load lock chamber body that is opposite to the first side.

18. The method of claim 15, further comprising:
monitoring conditions of the substrates within the first, second, third, and fourth chambers, wherein the monitoring comprises monitoring the conditions through transmissive chamber lids.

19. The method of claim 15, further comprising:
repeating the positioning, removing, processing, and re-positioning for additional substrates.

20. The method of claim 19, wherein the repeating for additional substrates begins after the removing.