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1. WO2007146643 - MULTI-LEVEL LOAD LOCK CHAMBER, TRANSFER CHAMBER, AND ROBOT SUITABLE FOR INTERFACING WITH SAME

Available information on National Phase entries(more information)
OfficeEntry DateNational NumberNational Status
China 04.06.2007200780015187.0
Japan 23.10.20082009515565
Republic of Korea 24.10.20081020087026104Published: 16.01.2009
Refused: 05.10.2011