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1. WO2007145792 - CHAMBER FOR A HIGH ENERGY EXCIMER LASER SOURCE

Publication Number WO/2007/145792
Publication Date 21.12.2007
International Application No. PCT/US2007/012393
International Filing Date 22.05.2007
IPC
H01S 3/20 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
14characterised by the material used as the active medium
20Liquids
CPC
H01S 3/03
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
02Constructional details
03of gas laser discharge tubes
H01S 3/036
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
02Constructional details
03of gas laser discharge tubes
036Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
H01S 3/038
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
02Constructional details
03of gas laser discharge tubes
038Electrodes, e.g. special shape, configuration or composition
H01S 3/225
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
14characterised by the material used as the active medium
22Gases
223the active gas being polyatomic, i.e. containing more than one atom
225comprising an excimer or exciplex
Applicants
  • CYMER, INC. [US]/[US] (AllExceptUS)
  • STEIGER, Thomas, D. [US]/[US] (UsOnly)
  • PARTLO, William, N. [US]/[US] (UsOnly)
Inventors
  • STEIGER, Thomas, D.
  • PARTLO, William, N.
Agents
  • HILLMAN, Matthew
Priority Data
11/447,50205.06.2006US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) CHAMBER FOR A HIGH ENERGY EXCIMER LASER SOURCE
(FR) chambre pour source laser excimEr à haute énergie
Abstract
(EN)
A chamber for a gas discharge laser is disclosed and may include a chamber housing having a wall, the wall having an inside surface surrounding a chamber volume and an outside surface, the wall also being formed with an orifice. For the chamber, at least one electrical conductor may extend through the orifice to pass an electric current into the chamber volume. A member may be disposed between the conductor and the wall for preventing gas flow through the orifice to allow a chamber pressure to be maintained in the volume. The chamber may further comprise a pressurized compartment disposed adjacent to the orifice for maintaining a pressure on at least a portion of the outside surface of the wall to reduce bowing of the wall near the orifice due to chamber pressure.
(FR)
L'invention concerne une chambre pour laser à gaz et peut comprendre un logement de chambre qui présente une paroi, la paroi présentant une surface interne qui entoure le volume de la chambre et une surface externe, un orifice étant également formé dans la paroi. Pour la chambre, au moins un conducteur électrique peut s'étendre à travers l'orifice afin qu'un courant électrique puisse passer dans le volume de la chambre. Un élément peut être placé entre le conducteur et la paroi pour empêcher un écoulement gazeux de traverser l'orifice et donc pour permettre de maintenir une pression dans le volume de la chambre. La chambre peut de plus comprendre un compartiment pressurisé placé à côté de l'orifice pour maintenir une pression sur au moins une partie de la surface externe de la paroi afin de réduire le bombement de la paroi provoqué près de l'orifice par la pression dans la chambre.
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