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1. WO2007145224 - END INCLINATION ANGLE MEASURING METHOD, INSPECTING METHOD AND INSPECTING APPARATUS FOR OBJECTS HAVING UNDULATIONS, METHOD FOR DETERMINING THE POSITION OF ILLUMINATING MEANS, IRREGULARITY INSPECTING APPARATUS, AND ILLUMINATING POSITION DETERMINING APPARATUS

Publication Number WO/2007/145224
Publication Date 21.12.2007
International Application No. PCT/JP2007/061842
International Filing Date 12.06.2007
IPC
G01B 11/26 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
26for measuring angles or tapers; for testing the alignment of axes
G01B 11/06 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
02for measuring length, width, or thickness
06for measuring thickness
G01M 11/00 2006.01
GPHYSICS
01MEASURING; TESTING
MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
11Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
G01N 21/88 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws, defects or contamination
CPC
G01B 11/26
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
26for measuring angles or tapers; for testing the alignment of axes
G01B 11/306
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
30for measuring roughness or irregularity of surfaces
306for measuring evenness
G02F 1/1309
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour 
13based on liquid crystals, e.g. single liquid crystal display cells
1306Details
1309Repairing; Testing
Applicants
  • シャープ株式会社 SHARP KABUSHIKI KAISHA [JP]/[JP] (AllExceptUS)
  • 井殿 多聞 IDEN, Tamon (UsOnly)
Inventors
  • 井殿 多聞 IDEN, Tamon
Agents
  • 特許業務法人原謙三国際特許事務所 HARAKENZO WORLD PATENT & TRADEMARK
Priority Data
2006-16288912.06.2006JP
2006-33105907.12.2006JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) END INCLINATION ANGLE MEASURING METHOD, INSPECTING METHOD AND INSPECTING APPARATUS FOR OBJECTS HAVING UNDULATIONS, METHOD FOR DETERMINING THE POSITION OF ILLUMINATING MEANS, IRREGULARITY INSPECTING APPARATUS, AND ILLUMINATING POSITION DETERMINING APPARATUS
(FR) PROCÉDÉ DE MESURE D'ANGLE D'INCLINAISON FINALE, PROCÉDÉ ET APPAREIL D'INSPECTION POUR DES OBJETS COMPORTANT DES ONDULATIONS, PROCÉDÉ POUR DÉTERMINER LA POSITION DE MOYENS D'ÉCLAIRAGE, APPAREIL D'INSPECTION D'IRRÉGULARITÉS, ET APPAREIL DE DÉTERMINAT
(JA) 端部傾斜角測定方法、起伏を有する被検査物の検査方法および検査装置、照明手段の位置を決定する方法、ムラ検査装置、照明位置決定装置
Abstract
(EN)
Provided is an end inclination angle measuring method for an object having undulations. The end inclination angle measuring method comprises the step (A) of irradiating the object with a light, the step (B) of detecting the reflected light distribution of the object, the step (C) of determining a characteristic point of the reflected light distribution from the detection result of the reflected light distribution, and the step (D) of determining, on the basis of the irradiation angle of the light at the step (A) with respect to a position on the object corresponding to the characteristic point and the detection angle of a reflected light at the step (B) according to the position on the object corresponding to the characteristic point, an end inclination or the inclination near the end of the undulations. Further provided are a method for determining an end inclination angle or an inclination angle near the end of undulations in an object having the undulations, and a method for inspecting the difference in thickness between individual undulations precisely on the basis of an end inclination angle.
(FR)
La présente invention concerne un procédé de mesure d'angle d'inclinaison finale pour un objet présentant des ondulations. Le procédé de mesure d'angle d'inclinaison finale comprend l'étape (A) consistant à irradier l'objet avec une lumière, l'étape (B) consistant à détecter la distribution de lumière réfléchie de l'objet, l'étape (C) consistant à déterminer un point caractéristique de la distribution de lumière réfléchie à partir du résultat de détection de la distribution de lumière réfléchie, et l'étape (D) consistant à déterminer, sur la base de l'angle d'irradiation de la lumière à l'étape (A) par rapport à une position sur l'objet correspondant au point caractéristique et à l'angle de détection d'une lumière réfléchie à l'étape (B) selon la position de l'objet correspondant au point caractéristique, une inclinaison finale ou l'inclinaison à proximité de l'extrémité des ondulations. L'invention concerne en outre un procédé pour déterminer un angle d'inclinaison finale ou un angle d'inclinaison à proximité de l'extrémité des ondulations dans un objet comportant les ondulations, et un procédé pour inspecter la différence d'épaisseur entre des ondulations individuelles de manière précise sur la base d'un angle d'inclinaison finale.
(JA)
 本発明に係る端部傾斜角測定方法は、上記課題を解決するために、起伏を有する被検査物における、端部傾斜角測定方法であって、上記被検査物に光を照射するステップAと、上記被検査物の反射光分布を検知するステップBと、上記反射光分布の検知結果から上記反射光分布の特徴点を求めるステップCと、上記特徴点に対応する被検査物上の位置に対する、ステップAにおける光の照射角度および上記特徴点に対応する被検査物上の位置による、ステップBにおける反射光の検知角度とに基づいて、上記起伏の端部付近の傾斜角である端部傾斜角を求めるステップDと、を含むこれにより、起伏を有する被検査物における、前記起伏の端部付近の傾斜角である端部傾斜角を求める方法および端部傾斜角に基づいて、各起伏間の起伏厚の差を精度よく検査する方法を提供する。
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