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1. WO2007143326 - MINI-PROBER FOR TFT-LCD TESTING

Publication Number WO/2007/143326
Publication Date 13.12.2007
International Application No. PCT/US2007/068642
International Filing Date 10.05.2007
IPC
G01R 1/067 2006.01
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1Details of instruments or arrangements of the types covered by groups G01R5/-G01R13/122
02General constructional details
06Measuring leads; Measuring probes
067Measuring probes
CPC
G09G 3/006
GPHYSICS
09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
3Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
006Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
Applicants
  • APPLIED MATERIALS, INC. [US]/[US] (AllExceptUS)
  • JOHNSTON, Benjamin M. [US]/[US] (UsOnly)
  • KRISHNASWAMI, Sriram [US]/[US] (UsOnly)
  • NGUYEN, Hung T. [US]/[US] (UsOnly)
  • BRUNNER, Matthias [DE]/[DE] (UsOnly)
  • LIU, Yong [CN]/[US] (UsOnly)
Inventors
  • JOHNSTON, Benjamin M.
  • KRISHNASWAMI, Sriram
  • NGUYEN, Hung T.
  • BRUNNER, Matthias
  • LIU, Yong
Agents
  • PATTERSON, B. Todd
Priority Data
60/803,59731.05.2006US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) MINI-PROBER FOR TFT-LCD TESTING
(FR) MINISONDE POUR TEST DE TF-LCD
Abstract
(EN)
An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays. The apparatus includes a prober assembly that is movable relative to the large area substrate and may be configured to test various patterns of displays and contact points. The prober assembly is also configured to test fractional sections of the large area substrate. The apparatus also includes a test chamber configured to store at least two prober assemblies within an interior volume.
(FR)
L'invention concerne un appareil et un procédé de test de substrats de grande surface. Les substrats de grande surface comprennent des motifs d'affichage et des points de contact raccordés électriquement aux affichages. L'appareil comprend un ensemble de sonde qui peut être déplacé par rapport aux substrats de grande surface et qui peut être configuré pour tester différents motifs d'affichage et de points de contact. L'ensemble de sonde est également configuré pour tester des parties du substrat de grande surface. L'appareil comprend également une chambre de test configurée pour conserver au moins deux ensembles de sonde dans son volume intérieur.
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