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1. WO2007142333 - SPUTTERING TARGET FOR FORMING HIGH STRENGTH OPTICAL RECORDING MEDIUM PROTECTION FILM

Publication Number WO/2007/142333
Publication Date 13.12.2007
International Application No. PCT/JP2007/061643
International Filing Date 08.06.2007
IPC
C23C 14/34 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
34Sputtering
C04B 35/00 2006.01
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME; MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
35Shaped ceramic products characterised by their composition; Ceramic compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
C04B 35/10 2006.01
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04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME; MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
35Shaped ceramic products characterised by their composition; Ceramic compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
01based on oxides
10based on aluminium oxide
C04B 35/48 2006.01
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04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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35Shaped ceramic products characterised by their composition; Ceramic compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
01based on oxides
48based on zirconium or hafnium oxides or zirconates or hafnates
C04B 35/50 2006.01
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04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME; MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
35Shaped ceramic products characterised by their composition; Ceramic compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
50based on rare earth compounds
G11B 7/254 2006.01
GPHYSICS
11INFORMATION STORAGE
BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
7Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation, reproducing using an optical beam at lower power; Record carriers therefor
24Record carriers characterised by shape, structure or physical properties, or by the selection of the material 
241Record carriers characterised by the selection of the material
252of layers other than recording layers
254of protective topcoat layers
CPC
C04B 2235/3225
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04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235Aspects relating to ceramic starting mixtures or sintered ceramic products
02Composition of constituents of the starting material or of secondary phases of the final product
30Constituents and secondary phases not being of a fibrous nature
32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
3224Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
3225Yttrium oxide or oxide-forming salts thereof
C04B 2235/3227
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04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235Aspects relating to ceramic starting mixtures or sintered ceramic products
02Composition of constituents of the starting material or of secondary phases of the final product
30Constituents and secondary phases not being of a fibrous nature
32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
3224Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
3227Lanthanum oxide or oxide-forming salts thereof
C04B 2235/3244
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235Aspects relating to ceramic starting mixtures or sintered ceramic products
02Composition of constituents of the starting material or of secondary phases of the final product
30Constituents and secondary phases not being of a fibrous nature
32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
3231Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
3244Zirconium oxides, zirconates, hafnium oxides, hafnates, or oxide-forming salts thereof
C04B 2235/3246
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04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235Aspects relating to ceramic starting mixtures or sintered ceramic products
02Composition of constituents of the starting material or of secondary phases of the final product
30Constituents and secondary phases not being of a fibrous nature
32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
3231Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
3244Zirconium oxides, zirconates, hafnium oxides, hafnates, or oxide-forming salts thereof
3246Stabilised zirconias, e.g. YSZ or cerium stabilised zirconia
C04B 2235/3286
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235Aspects relating to ceramic starting mixtures or sintered ceramic products
02Composition of constituents of the starting material or of secondary phases of the final product
30Constituents and secondary phases not being of a fibrous nature
32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
3286Gallium oxides, gallates, indium oxides, indates, thallium oxides, thallates or oxide forming salts thereof, e.g. zinc gallate
C04B 2235/3418
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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2235Aspects relating to ceramic starting mixtures or sintered ceramic products
02Composition of constituents of the starting material or of secondary phases of the final product
30Constituents and secondary phases not being of a fibrous nature
34Non-metal oxides, non-metal mixed oxides, or salts thereof that form the non-metal oxides upon heating, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
3418Silicon oxide, silicic acids, or oxide forming salts thereof, e.g. silica sol, fused silica, silica fume, cristobalite, quartz or flint
Applicants
  • 三菱マテリアル株式会社 MITSUBISHI MATERIALS CORPORATION [JP]/[JP] (AllExceptUS)
  • 張 守斌 ZHANG, Shoubin [CN]/[JP] (UsOnly)
  • 佐々木 勇人 SASAKI, Hayato [JP]/[JP] (UsOnly)
  • 小見山 昌三 KOMIYAMA, Syozou [JP]/[JP] (UsOnly)
  • 三島 昭史 MISHIMA, Akifumi [JP]/[JP] (UsOnly)
Inventors
  • 張 守斌 ZHANG, Shoubin
  • 佐々木 勇人 SASAKI, Hayato
  • 小見山 昌三 KOMIYAMA, Syozou
  • 三島 昭史 MISHIMA, Akifumi
Agents
  • 志賀 正武 SHIGA, Masatake
Priority Data
2006-15930308.06.2006JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) SPUTTERING TARGET FOR FORMING HIGH STRENGTH OPTICAL RECORDING MEDIUM PROTECTION FILM
(FR) CIBLE DE PULVÉRISATION POUR LA FORMATION D'UN FILM DE PROTECTION POUR SUPPORT D'ENREGISTREMENT OPTIQUE HAUTE RÉSISTANCE
(JA) 高強度光記録媒体保護膜形成用スパッタリングターゲット
Abstract
(EN)
A sputtering target for forming a high strength optical recording medium protection film is provided by sintering a mixed powdery material having a formula composition containing, in mol %, a zirconium oxide or a hafnium oxide of 10-70%, a silicon dioxide of 50% or less (not including 0%), and yttrium oxide of 0.1-8.4%, if necessary, and aluminum oxide, lanthanum oxide or indium oxide and an unavoidable impurities for the rest. A target base material has a structure wherein a composite oxide phase having a composition of Al6Si2O13 or La2SiO5 or In2Si2O7 is generated.
(FR)
L'invention concerne une cible de pulvérisation pour former un film de protection pour support d'enregistrement optique haute résistance obtenu par frittage d'un matériau mixte en poudre dont la composition de la formule comprend, en % molaire, de 10 à 70 % d'oxyde de zirconium, 50 % ou moins de dioxyde de silicium (mais pas 0 %), et de 0,1 à 8,4 % d'oxyde d'yttrium, au besoin un oxyde d'aluminium, un oxyde de lanthane ou un oxyde d'indium et le reste étant formé d'impuretés inévitables. Un matériau de base cible a une structure où est générée la phase oxyde composite avec une composition d'Al6Si2O13, La2SiO5 ou In2Si2O7.
(JA)
 この高強度光記録媒体保護膜形成用スパッタリングターゲットは、モル%で、酸化ジルコニウムまたは酸化ハフニウム:10~70%、二酸化ケイ素:50%以下(0%を含まず)を含有し、必要に応じて酸化イットリウム:0.1~8.4%を含有し、残部:酸化アルミニウム、酸化ランタンまたは酸化インジウムおよび不可避不純物からなる配合組成を有する混合粉末を焼結した光記録媒体保護膜形成用スパッタリングターゲットにおいて、ターゲット素地中にAlSi13、LaSiOまたはInSiの組成を有する複合酸化物相が生成している組織を有する。
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