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1. WO2007142100 - OPTICAL SYSTEM MANUFACTURING METHOD

Publication Number WO/2007/142100
Publication Date 13.12.2007
International Application No. PCT/JP2007/061016
International Filing Date 30.05.2007
IPC
B29D 11/00 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
DPRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
11Producing optical elements, e.g. lenses or prisms
B29C 33/38 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
33Moulds or cores; Details thereof or accessories therefor
38characterised by the material or the manufacturing process
C03B 11/08 2006.01
CCHEMISTRY; METALLURGY
03GLASS; MINERAL OR SLAG WOOL
BMANUFACTURE OR SHAPING OF GLASS, OR OF MINERAL OR SLAG WOOL; SUPPLEMENTARY PROCESSES IN THE MANUFACTURE OR SHAPING OF GLASS, OR OF MINERAL OR SLAG WOOL
11Pressing glass
06Construction of plunger or mould
08for making solid articles, e.g. lenses
C03B 17/00 2006.01
CCHEMISTRY; METALLURGY
03GLASS; MINERAL OR SLAG WOOL
BMANUFACTURE OR SHAPING OF GLASS, OR OF MINERAL OR SLAG WOOL; SUPPLEMENTARY PROCESSES IN THE MANUFACTURE OR SHAPING OF GLASS, OR OF MINERAL OR SLAG WOOL
17Forming glass by flowing out, pushing-out, or drawing downwardly or laterally from forming slits or by overflowing over lips
G01M 11/00 2006.01
GPHYSICS
01MEASURING; TESTING
MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
11Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
G02B 13/16 2006.01
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
13Optical objectives specially designed for the purposes specified below
16for use in conjunction with image converters or intensifiers
CPC
B29C 33/3835
BPERFORMING OPERATIONS; TRANSPORTING
29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
33Moulds or cores; Details thereof or accessories therefor
38characterised by the material or the manufacturing process
3835Designing moulds, e.g. using CAD-CAM
G02B 17/0663
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
17Systems with reflecting surfaces, with or without refracting elements
02Catoptric systems, e.g. image erecting and reversing system
06using mirrors only ; , i.e. having only one curved mirror
0647using more than three curved mirrors
0663off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements
Applicants
  • コニカミノルタオプト株式会社 Konica Minolta Opto, Inc. [JP]/[JP] (AllExceptUS)
  • 増渕 友一 MASUBUCHI, Tomokazu [JP]/[JP] (UsOnly)
  • 今岡 雅之 IMAOKA, Masayuki [JP]/[JP] (UsOnly)
  • 瀧谷 俊哉 TAKITANI, Toshiya [JP]/[JP] (UsOnly)
  • 林 宏太郎 HAYASHI, Kohtaro [JP]/[JP] (UsOnly)
  • 石原 淳 ISHIHARA, Jun [JP]/[JP] (UsOnly)
  • 松本 安弘 MATSUMOTO, Yasuhiro [JP]/[JP] (UsOnly)
  • 奥村 佳弘 OKUMURA, Yoshihiro [JP]/[JP] (UsOnly)
Inventors
  • 増渕 友一 MASUBUCHI, Tomokazu
  • 今岡 雅之 IMAOKA, Masayuki
  • 瀧谷 俊哉 TAKITANI, Toshiya
  • 林 宏太郎 HAYASHI, Kohtaro
  • 石原 淳 ISHIHARA, Jun
  • 松本 安弘 MATSUMOTO, Yasuhiro
  • 奥村 佳弘 OKUMURA, Yoshihiro
Agents
  • 佐野 静夫 SANO, Shizuo
Priority Data
2006-15623205.06.2006JP
2006-34525022.12.2006JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) OPTICAL SYSTEM MANUFACTURING METHOD
(FR) PROCÉDÉ DE FABRICATION D'UN SYSTÈME OPTIQUE
(JA) 光学系の製造方法
Abstract
(EN)
A projection optical system (PS) manufacturing method evaluates an optical performance of an entire system from approximate planes of all the optical planes in the projection optical system (PS) and changes at least one of the approximate planes of all the optical planes (such as a reduction side lens plane (S(L2s)) of a second lens L2 of an initial article referred to as 'a change approximate plane') so as to obtain a change amount of tbe change approximate plane when optimal optical performance is obtained as the entire system. According to the change amount, a correction treatment amount for the cavity plane of a metal mold corresponding to the change approximate plane is obtained to perform correction treatment, thereby manufacturing a new cavity plane.
(FR)
La présente invention concerne un procédé de fabrication de système optique (PS) qui évalue la performance optique de tout un système à partir de plans approchés de tous les plans optiques dans le système optique de projection (PS) et modifie au moins l'un des plans approchés de tous les plans optiques (tel un plan de lentille latéral de réduction (S(L2s) d'une seconde lentille L2 d'un article initial qualifié de 'plan approché de modification'), afin d'obtenir une quantité de modification du plan approché de modification, lorsque la performance optique est obtenue pour tout le système. Selon la quantité de modification, une quantité de traitement de correction, destinée au plan de la cavité d'un moule métallique correspondant au plan approché de modification, est obtenue afin d'effectuer un traitement de correction, ce qui permet de fabriquer un nouveau plan de cavité.
(JA)
 投影光学系(PS)の製造方法は、かかる投影光学系(PS)内における全光学面の近似面から、全系の光学性能を評価し、さらに、全光学面の近似面のうち少なくとも1面{例えば、イニシャル品の第2レンズL2の縮小側レンズ面(S(L2s));「変化近似面」と称す}を変化させることで、全系としての最適な光学性能を発揮する場合の変化近似面の変化量を求めている。そして、かかる変化量に基づいて変化近似面に対応する金型のキャビティ面に対する補正加工量を求めて補正加工することで、新たなキャビティ面を作製している。
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