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1. WO2007138893 - POSITIVE RESIST COMPOSITION AND METHOD FOR FORMATION OF RESIST PATTERN

Available information on National Phase entries(more information)
OfficeEntry DateNational NumberNational Status
United States of America 04.11.200812299523Published: 19.03.2009
Granted: 17.08.2010
Republic of Korea 28.11.20081020087029148Published: 16.01.2009
Granted: 27.10.2010