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1. WO2007096873 - ACCELEROMETER

Publication Number WO/2007/096873
Publication Date 30.08.2007
International Application No. PCT/IL2007/000230
International Filing Date 20.02.2007
IPC
G01P 15/125 2006.01
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces
08with conversion into electric or magnetic values
125by capacitive pick-up
CPC
G01P 15/125
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces ; using solid seismic masses
08with conversion into electric or magnetic values
125by capacitive pick-up
G01P 2015/0814
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces ; using solid seismic masses
08with conversion into electric or magnetic values
0805being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
0808for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
0811for one single degree of freedom of movement of the mass
0814for translational movement of the mass, e.g. shuttle type
Applicants
  • PHYSICAL LOGIC AG [CH]/[CH] (AllExceptUS)
  • AXELROD, Noel [IL]/[IL] (UsOnly)
  • OFEK, Eran [IL]/[IL] (UsOnly)
Inventors
  • AXELROD, Noel
  • OFEK, Eran
Agents
  • FRIEDMAN, Mark
Priority Data
11/674,95114.02.2007US
60/775,53021.02.2006US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) ACCELEROMETER
(FR) ACCÉLÉROMÈTRE
Abstract
(EN)
An accelerometer is fabricated as a MEMS device and includes an array of capacitive electrode plates mechanically coupled to a common proof mass. The proof mass is constrained to move or vibrate in the plane parallel to the first array of plates. The capacitance between the first array of plates is measured with respect to additional arrays of capacitive plates inter-digitated in a comb like pattern.
(FR)
L'invention concerne un accéléromètre de type MEMS comprenant un réseau de plaques d'électrodes capacitives couplées de manière mécanique à une masse étalon commune. La masse étalon est contrainte de manière à se déplacer ou vibrer dans le plan parallèle au premier réseau de plaques. La capacitance entre le premier réseau de plaques est mesurée par rapport à des réseaux supplémentaires de plaques capacitives interdigitées selon un motif en peigne.
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